Patent Dr.-Ing. Ludwig Herzog
Head of Mechatronics
Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.
Patent No.:Dr.-Ing. Ludwig Herzog
Inventor:
Research field:Magnetic 6D-direct drives with nanometre precision
Date of first publication:10 November 2014
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Air bearings in high-precision vacuum applications? Together with our partners, we are exploring the technical feasibility of this (apparent) contradiction.
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NFM-100
For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.
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K4PNP+Z
IMMS developed actuators to position objects in planes with diameters up to 200 mm and a vertical stroke of 25 mm with nanometre precision.
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Hochempfindliche Beschleunigungsmessung mit kleinem MEMS-Sensor
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Das Parallelisieren von Motor- und Regelungsentwurf reduziert Entwicklungszeit und -kosten
Dr. Ch. Schäffel1. M. Katzschmann1.Erschienen in MSR-Magazin, Automatisierungstechnik für Fertigung und Prozess, 03/2010
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.ArticleOptical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS
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Event,
euspen SIG: Micro/Nano Manufacturing 2023
euspen Special Interest Group Meeting: Micro/Nano Manufacturing 2023
Contact
Contact
Eric Schäfer, M. Sc.
Head of Microelectronics / Branch Office Erfurt
eric.schaefer(at)imms.de+49 (0) 361 663 25 35
Eric Schäfer and his team research Integrated sensor systems, especially CMOS-based biosensors, ULP sensor systems and AI-based design and test automation. The results are being incorporated into research on the lead applications Sensor systems for in-vitro diagnostics and RFID sensor technology. It will assist you with services for the development of Integrated circuits and with IC design methods.
Contact
Dipl.-Ing. Michael Meister
Head of Industrial Electronics and Measurement Technology
michael.meister(at)imms.de+49 (0) 3677 874 93 20
Michael Meister is your contact for testing services, the development of test methodologies, and long-term measurements. He answers your questions on Modular and mobile test systems that we develop in our research in Smart distributed measurement and test systems as well as about testing and characterisation of integrated sensor systems. He is responsible for the test equipment at IMMS and will support you in the validation of ASIC and MEMS developments.
Mechatronics department
Our mechatronics team is interdisciplinary to ensure success in research and development for application-specific mechatronic systems for research and industrial customers, and takes care of the
- design of electro-magnetic actuators,
- modelling and simulation of the static, dynamic and thermal behaviour of mechatronic systems,
- development of suitable control algorithms and their programming, as well as the
- practical implementation in the form of prototypes.
Most of our scientific staff have academic degrees in mechatronics and control engineering as well as in related fields of study such as mathematics or electrical engineering.
We supervise four to six students per year in internships, bachelor's and master's theses at our location in Ilmenau. In addition, we provide staff for the SME Digital Team at IMMS.
We support you with research and development in the following areas
![[Translate to English:]](/fileadmin/_processed_/9/0/csm_20200731_IMG_2732_K4PNP-INPOS_SG_1920x1280_7c70c69f8a.jpg "[Translate to English:]")
Service for R&D
Development of mechatronic systems
We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.
Service for R&D
Finite Element Modeling
We support you in the concept and development phase of new products with calculations and simulations to shorten development times and improve product parameters such as weight & material savings or minimisation of natural vibrations.
Research field
Magnetic 6D direct drives with nm precision
To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.
Service for R&D
MEMS – simulation, design and test
As a design house for the open technology platform XMB-10 from X-FAB, we develop acceleration sensors according to your specification in a semi-automated design process.
Lead application
nm measurement and structuring of objects
To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.
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