Research field Magnetic 6D direct drives with nanometre precision
The continuous reduction in the size of the structural elements of technical products in many different sectors increases the demand for precision machinery with which tiniest structures and objects can be measured and manufactured with high accuracy. There are many such objects having spatial extents from millimetres to centimetres, while surface characteristics and functional elements are just a few microns or nanometres in size and have to be positioned with a precision less than one nanometre in the production process.
To blaze the trail for the manufacturing of components from the macro-world with the precision that is associated with the micro- and nano-world, we conduct research on the scientific fundamentals and technical solutions to implement nanopositioning systems acting over long distances of travel. Our highly dynamic integrated multi-coordinate drives move objects with the same accuracy over distances of several hundred millimetres within the shortest time. Our solutions are intended for use under vacuum, in cleanrooms and sites with particular requirements for thermal insulation and elimination of vibrations.
Contact
Contact
Dr.-Ing. Ludwig Herzog
Head of Mechatronics
ludwig.herzog(at)imms.de+49 (0) 3677 874 93 60
Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.
Related content
Project
NFM-100
For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.
Project
K4PNP+Z
IMMS develops actuators to position objects in planes with diameters up to 200 mm and a vertical stroke of 25 mm with nanometre precision.
Project
INPOS
Novel 6DOF integrated direct drive moving large objects with small vertical dimensions through nanometre spaces
Project
PTB
For the Physikalisch-Technische Bundesanstalt (PTB) IMMS developed a high-precision positioning system for measurement scales of the coming microelectronics generation.
Reference
Dr. Denis Dontsov, SIOS Meßtechnik GmbH
“The positioning results achieved clearly have high potential for resolving detailed enquiries from future customers and for new types of SIOS nanopositioning systems offering a significantly extended field of measurement.”
Reference
Prof. Dr. Thomas Arnold, Leibniz IOM
“We are extremely pleased with the resulting demonstration device. Besides proven competence in drive design and experience of product development in the service of research institutes, IMMS also brought to the task a highly professional, purposeful and constructive approach.”
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Reference
Michael Muth, AeroLas
“We have for many years been appreciative of our cooperation with IMMS. The results from this project will be the basis of product design to the specification of future AeroLas customers. IMMS will likewise be an important partner for us in future developments because of its outstanding expertise in the field of magnetic drives.“
Reference
Steffen Arnold, Physik Instrumente
”Our scientists have moved forward in the company of their IMMS colleagues into magnetic drive territory where there are prospects of hitherto unattainable accuracy of positioning, whether on a plane or in 6 dimensions.”
Operation and performance evaluation of vertical nanopositioners for 10 mm stroke in a 3D lift and tilt test setup
Steffen Hesse1. Michael Katzschmann1. Alex S. Huaman1. Stephan Gorges1. Eberhard Manske2.euspen – Special Interest Group Meeting: Precision Motion Systems & Control, 15th – 16th November 2022, s-Hertogenbosch, The Netherlands, NL
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 2Institut für Prozessmess- und Sensortechnik, Technische Universität Ilmenau, Ilmenau, Germany.Robust Tracking Control with L1 Adaptive Augmentation for a Long Stroke Vertical Nanopositioning System: Part II
Alex S. Huaman1. Johann Reger2.2022 IEEE Conference on Control Technology and Applications (CCTA), 2022, pp. 621-627, DOI: doi.org/10.1109/CCTA49430.2022.9965993, 22 - 25 August, 2022, Trieste, Italy
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 2Control Engineering Group, Technische Universität Ilmenau, P.O. Box 10-05-65, D-98684, Ilmenau, Germany.Robust Tracking Control with L1 Adaptive Augmentation for a Long-Stroke Vertical Nanopositioning System: Part I
Alex S. Huaman1. Johann Reger2.2022 IEEE Conference on Control Technology and Applications (CCTA), 2022, pp. 614-620, DOI: doi.org/10.1109/CCTA49430.2022.9966103, 22 - 25 August, 2022, Trieste, Italy
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 2Control Engineering Group, Technische Universität Ilmenau, P.O. Box 10-05-65, D-98684, Ilmenau, Germany.Measurement Precision of a Planar Nanopositioning Machine with a Range of Motion of Ø100 mm
Jaqueline Stauffenberg1. Ingo Ortlepp1. Johannes Belkner1. Denis Dontsov2. Enrico Langlotz2. Steffen Hesse3. Ivo Rangelow4. Eberhard Manske1.Applied Sciences. 2022; 12(15):7843. DOI: doi.org/10.3390/app12157843
1Production and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Gustav-Kirchhoff-Straße 1, 98693 Ilmenau, Germany. 2SIOS Meßtechnik GmbH, Am Vogelherd 46, 98693 Ilmenau, Germany. 3IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 4nano analytik GmbH, Ehrenbergstraße 1, 98693 Ilmenau, Germany.
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Service for R&D
Development of mechatronic systems
We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.
Service for R&D
Finite Element Modeling
We support you in the concept and development phase of new products with calculations and simulations to shorten development times and improve product parameters such as weight & material savings or minimisation of natural vibrations.
Lead application
nm measurement and structuring of objects
To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.