The continuous reduction in the size of the structural elements of technical products in many different sectors increases the demand for precision machinery with which tiniest structures and objects can be measured and manufactured with high accuracy. There are many such objects having spatial extents from millimetres to centimetres, while surface characteristics and functional elements are just a few microns or nanometres in size and have to be positioned with a precision less than one nanometre in the production process.
To blaze the trail for the manufacturing of components from the macro-world with the precision that is associated with the micro- and nano-world, we conduct research on the scientific fundamentals and technical solutions to implement nanopositioning systems acting over long distances of travel. Our highly dynamic integrated multi-coordinate drives move objects with the same accuracy over distances of several hundred millimetres within the shortest time. Our solutions are intended for use under vacuum, in cleanrooms and sites with particular requirements for thermal insulation and elimination of vibrations.
Dr.-Ing. Frank Spiller
Interim Head of Mechatronics
frank.spiller(at)imms.de+49 (0) 3677 874 93 61
Dr. Frank Spiller will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.
IMMS develops actuators to position objects in planes with diameters up to 200 mm and a vertical stroke of 25 mm with nanometre precision.
Novel 6DOF integrated direct drive moving large objects with small vertical dimensions through nanometre spaces
For the Physikalisch-Technische Bundesanstalt (PTB) IMMS developed a high-precision positioning system for measurement scales of the coming microelectronics generation.
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Prof. Dr. Thomas Arnold, Leibniz IOM
“We are extremely pleased with the resulting demonstration device. Besides proven competence in drive design and experience of product development in the service of research institutes, IMMS also brought to the task a highly professional, purposeful and constructive approach.”