Research field Magnetic 6D direct drives with nanometre precision
The continuous reduction in the size of the structural elements of technical products in many different sectors increases the demand for precision machinery with which tiniest structures and objects can be measured and manufactured with high accuracy. There are many such objects having spatial extents from millimetres to centimetres, while surface characteristics and functional elements are just a few microns or nanometres in size and have to be positioned with a precision less than one nanometre in the production process.
To blaze the trail for the manufacturing of components from the macro-world with the precision that is associated with the micro- and nano-world, we conduct research on the scientific fundamentals and technical solutions to implement nanopositioning systems acting over long distances of travel. Our highly dynamic integrated multi-coordinate drives move objects with the same accuracy over distances of several hundred millimetres within the shortest time. Our solutions are intended for use under vacuum, in cleanrooms and sites with particular requirements for thermal insulation and elimination of vibrations.
Contact
Contact
Dr.-Ing. Frank Spiller
Interim Head of Mechatronics
frank.spiller(at)imms.de+49 (0) 3677 874 93 61
Dr. Frank Spiller will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.
Related content
Project
K4PNP+Z
IMMS develops actuators to position objects in planes with diameters up to 200 mm and a vertical stroke of 25 mm with nanometre precision.
Project
INPOS
Novel 6DOF integrated direct drive moving large objects with small vertical dimensions through nanometre spaces
Project
PTB
For the Physikalisch-Technische Bundesanstalt (PTB) IMMS developed a high-precision positioning system for measurement scales of the coming microelectronics generation.
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Reference
Dr. Denis Dontsov, SIOS Meßtechnik GmbH
“The positioning results achieved clearly have high potential for resolving detailed enquiries from future customers and for new types of SIOS nanopositioning systems offering a significantly extended field of measurement.”
Reference
Prof. Dr. Thomas Arnold, Leibniz IOM
“We are extremely pleased with the resulting demonstration device. Besides proven competence in drive design and experience of product development in the service of research institutes, IMMS also brought to the task a highly professional, purposeful and constructive approach.”
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Reference
Michael Muth, AeroLas
“We have for many years been appreciative of our cooperation with IMMS. The results from this project will be the basis of product design to the specification of future AeroLas customers. IMMS will likewise be an important partner for us in future developments because of its outstanding expertise in the field of magnetic drives.“
Reference
Steffen Arnold, Physik Instrumente
”Our scientists have moved forward in the company of their IMMS colleagues into magnetic drive territory where there are prospects of hitherto unattainable accuracy of positioning, whether on a plane or in 6 dimensions.”
Investigations on the Tracking Control and Performance of a Long Stroke Vertical Nanopositioning Drive
Alex S. Huaman1. Stephan Gorges1. Michael Katzschmann1. Steffen Hesse1. Thomas Fröhlich2. Eberhard Manske2.Euspen (European Society for Precision Engineering and Nanotechnology) – 22nd International Conference & Exhibition, 30 May – 3 June 2022, Geneva, Switzerland
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 2Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, 98693 Ilmenau, Germany.Nanometergenaue Hubmodule für die Präzisionsantriebstechnik
Stephan Gorges1.Konstruktion (2021) Nr. 11-12, Sonderteil Antriebstechnik, Seite 36 - 40, www.ingenieur.de/fachmedien/konstruktion/antriebstechnik/hubmodule-fuer-die-praezisionsantriebstechnik/
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control
Alex S. Huaman1. Michael Katzschmann1. Steffen Hesse1. Christoph Schäffel1. Christoph Weise2. Denis Dontsov3. Eberhard Manske2. Johann Reger2.2021 IEEE International Conference on Mechatronics (ICM2021), DOI: doi.org/10.1109/ICM46511.2021.9385699, 7 - 9 March 2021, Kashiwa, Japan
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 2Technische Universität Ilmenau, Germany. 3SIOS Meßtechnik GmbH, Germany.Nanopositioning and fabrication using the Nano Fabrication Machine with a positioning range up to ⊘100 mm
Jaqueline Stauffenberg1. Christoph Reuter1. Ingo Ortlepp1. Mathias Holz2. Denis Dontsov3. Christoph Schäffel4. Jens-Peter Zöllner1. Ivo Rangelow1. Steffen Strehle1. Eberhard Manske1.Proc. SPIE 11610, Novel Patterning Technologies 2021, 1161016 (22 February 2021); DOI: doi.org/10.1117/12.2583703
1Technische Universität Ilmenau, Germany. 2nano analytik GmbH, Germany. 3SIOS Meßtechnik GmbH, Germany. 4IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.
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Service for R&D
Development of mechatronic systems
We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.
Service for R&D
Finite Element Modeling
We support you in the concept and development phase of new products with calculations and simulations to shorten development times and improve product parameters such as weight & material savings or minimisation of natural vibrations.
Lead application
nm measurement and structuring of objects
To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.