Research field Magnetic 6D direct drives with nanometre precision
The continuous reduction in the size of the structural elements of technical products in many different sectors increases the demand for precision machinery with which tiniest structures and objects can be measured and manufactured with high accuracy. There are many such objects having spatial extents from millimetres to centimetres, while surface characteristics and functional elements are just a few microns or nanometres in size and have to be positioned with a precision less than one nanometre in the production process.
To blaze the trail for the manufacturing of components from the macro-world with the precision that is associated with the micro- and nano-world, we conduct research on the scientific fundamentals and technical solutions to implement nanopositioning systems acting over long distances of travel. Our highly dynamic integrated multi-coordinate drives move objects with the same accuracy over distances of several hundred millimetres within the shortest time. Our solutions are intended for use under vacuum, in cleanrooms and sites with particular requirements for thermal insulation and elimination of vibrations.
Contact
Contact
Dr.-Ing. Ludwig Herzog
Head of Mechatronics
ludwig.herzog(at)imms.de+49 (0) 3677 874 93 60
Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.
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VirtuSen
With the help of virtual sensor technology and AI, it is intended to detect and compensate for disruptive influences on complex mechatronic systems such as high-precision drives with spatial resolution
Project
NFM-100
For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.
Project
K4PNP+Z
IMMS developed actuators to position objects in planes with diameters up to 200 mm and a vertical stroke of 25 mm with nanometre precision.
Project
INPOS
Novel 6DOF integrated direct drive moving large objects with small vertical dimensions through nanometre spaces
Reference
Dr. Denis Dontsov, SIOS Meßtechnik GmbH
“The positioning results achieved clearly have high potential for resolving detailed enquiries from future customers and for new types of SIOS nanopositioning systems offering a significantly extended field of measurement.”
Reference
Prof. Dr. Thomas Arnold, Leibniz IOM
“We are extremely pleased with the resulting demonstration device. Besides proven competence in drive design and experience of product development in the service of research institutes, IMMS also brought to the task a highly professional, purposeful and constructive approach.”
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Reference
Michael Muth, AeroLas
“We have for many years been appreciative of our cooperation with IMMS. The results from this project will be the basis of product design to the specification of future AeroLas customers. IMMS will likewise be an important partner for us in future developments because of its outstanding expertise in the field of magnetic drives.“
Reference
Steffen Arnold, Physik Instrumente
”Our scientists have moved forward in the company of their IMMS colleagues into magnetic drive territory where there are prospects of hitherto unattainable accuracy of positioning, whether on a plane or in 6 dimensions.”
A method for dynamic interferometric characterization of air bearings for nanopositioning stages
Steffen Hesse1. Michael Katzschmann1. Alex Huaman1. Parastoo Salimitari1. Ludwig Herzog1.Ilmenauer Nacht der Interferometrie und Internationales Wissenschaftliches Symposium zum Welttag der Interferometrie, 8. - 9. April 2025, Technische Universität Ilmenau, Ilmenau
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.A virtual metrology frame test setup using fiber interferometric sensors
Davi Anders Brasil1. Steffen Hesse1. Ludwig Herzog1. Thomas Fröhlich2. Thomas Kissinger2.22nd International Metrology Congress (CIM 2025), Lyon, France, March 11-14, 2025
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany. 2Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau.Disturbance rejection in periodic motion with enhanced constant velocity transitions using a tilt-mirror test setup
Alex S. Huaman1. Michael Katzschmann1. Steffen Hesse1. Ludwig Herzog1.Special Interest Conference: Precision Motion Systems and Control, Brabanthallen’s-Hertogenbosch, Netherlands, November 12-13, 2024
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.NPS6D200 – Realization of high precision long stroke vertical actuation in conjunction with a planar direct drive
Steffen Hesse1. Michael Katzschmann1. Alex S. Huaman1. Davi-Anders Brasil1. Ludwig Herzog1.Special Interest Conference: Precision Motion Systems and Control, Brabanthallen’s-Hertogenbosch, Netherlands, November 12-13, 2024
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.
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Service for R&D
Development of mechatronic systems
We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.
Service for R&D
Finite Element Modeling
We support you in the concept and development phase of new products with calculations and simulations to shorten development times and improve product parameters such as weight & material savings or minimisation of natural vibrations.
Lead application
nm measurement and structuring of objects
To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.