Our goal is to create the basis for the measurement and manufacturing technology of the future with high-precision drive systems. From today’s planar (2.5D) motion accuracies in the sub-µm range, we are on the way to spatial (6D) positioning accuracies in the single-digit nm range. On the basis of our research, we are developing actuators that make it possible to position an object on a surface with a diameter of 100 mm and a vertical stroke of 10 mm with nanometre precision. In perspective, the diameter will be extended to 200 mm and the z-stroke to 25 mm. Such systems are used, for example, in precision metrology and for the production of semiconductor wafers and exposure masks in microelectronics manufacturing.
Dr.-Ing. Frank Spiller
Interim Head of Mechatronics
frank.spiller(at)imms.de+49 (0) 3677 874 93 61
Dr. Frank Spiller will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.
IMMS develops actuators to position objects in planes with diameters up to 200 mm and a vertical stroke of 25 mm with nanometre precision.
Novel 6DOF integrated direct drive moving large objects with small vertical dimensions through nanometre spaces
For the Physikalisch-Technische Bundesanstalt (PTB) IMMS developed a high-precision positioning system for measurement scales of the coming microelectronics generation.
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Michael Muth, AeroLas
“We have for many years been appreciative of our cooperation with IMMS. The results from this project will be the basis of product design to the specification of future AeroLas customers. IMMS will likewise be an important partner for us in future developments because of its outstanding expertise in the field of magnetic drives.“