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Lead application nm measurement and structuring of objects

Our goal is to create the basis for the measurement and manufacturing technology of the future with high-precision drive systems. From today’s planar (2.5D) motion accuracies in the sub-µm range, we are on the way to spatial (6D) positioning accuracies in the single-digit nm range. On the basis of our research, we are developing actuators that make it possible to position an object on a surface with a diameter of 100 mm and a vertical stroke of 10 mm with nanometre precision. In perspective, the diameter will be extended to 200 mm and the z-stroke to 25 mm. Such systems are used, for example, in precision metrology and for the production of semiconductor wafers and exposure masks in microelectronics manufacturing.



Dr.-Ing. Ludwig Herzog

Head of Mechatronics

ludwig.herzog(at) (0) 3677 874 93 60

Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.

Related content

High-precision drive systems with spatial (6D) positioning accuracies in the single-digit nm range.



For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.



IMMS developed actuators to position objects in planes with diameters up to 200 mm and a vertical stroke of 25 mm with nanometre precision.



Novel 6DOF integrated direct drive moving large objects with small vertical dimensions through nanometre spaces



For the Physikalisch-Technische Bundesanstalt (PTB) IMMS developed a high-precision positioning system for measurement scales of the coming microelectronics generation.

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Michael Muth, AeroLas

“We have for many years been appreciative of our cooperation with IMMS. The results from this project will be the basis of product design to the specification of future AeroLas customers. IMMS will likewise be an important partner for us in future developments because of its outstanding expertise in the field of magnetic drives.“


Peter Chall, ALSI

”The achieved extreme precision, reproducibility and productivity of the laser dicing technology are at the forefront of international excellence. The close cooperation with IMMS leads to innovative developments, which is a basis that we can count on to expand our position as a leading technology provider.“

All publications nm measurement and structuring of objects

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Service for R&D

Development of mechatronic systems

We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.

Service for R&D

Finite Element Modeling

We support you in the concept and development phase of new products with calculations and simulations to shorten development times and improve product parameters such as weight & material savings or minimisation of natural vibrations.

Research field

Magnetic 6D direct drives with nm precision

To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.