Lead application nm measurement and structuring of objects
Our goal is to create the basis for the measurement and manufacturing technology of the future with high-precision drive systems. From today’s planar (2.5D) motion accuracies in the sub-µm range, we are on the way to spatial (6D) positioning accuracies in the single-digit nm range. On the basis of our research, we are developing actuators that make it possible to position an object on a surface with a diameter of 100 mm and a vertical stroke of 10 mm with nanometre precision. In perspective, the diameter will be extended to 200 mm and the z-stroke to 25 mm. Such systems are used, for example, in precision metrology and for the production of semiconductor wafers and exposure masks in microelectronics manufacturing.
Contact
Contact
Dr.-Ing. Frank Spiller
Interim Head of Mechatronics
frank.spiller(at)imms.de+49 (0) 3677 874 93 61
Dr. Frank Spiller will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.
Related content
Project
K4PNP+Z
IMMS develops actuators to position objects in planes with diameters up to 200 mm and a vertical stroke of 25 mm with nanometre precision.
Project
INPOS
Novel 6DOF integrated direct drive moving large objects with small vertical dimensions through nanometre spaces
Project
PTB
For the Physikalisch-Technische Bundesanstalt (PTB) IMMS developed a high-precision positioning system for measurement scales of the coming microelectronics generation.
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
![[Translate to English:]](/fileadmin/_processed_/5/1/csm_Aerolas_Logo_ohne-Claim_434x112_a80595ae78.png "[Translate to English:]"){kind=logo}
Reference
Michael Muth, AeroLas
“We have for many years been appreciative of our cooperation with IMMS. The results from this project will be the basis of product design to the specification of future AeroLas customers. IMMS will likewise be an important partner for us in future developments because of its outstanding expertise in the field of magnetic drives.“
Reference
Peter Chall, ALSI
”The achieved extreme precision, reproducibility and productivity of the laser dicing technology are at the forefront of international excellence. The close cooperation with IMMS leads to innovative developments, which is a basis that we can count on to expand our position as a leading technology provider.“
Investigations on the Tracking Control and Performance of a Long Stroke Vertical Nanopositioning Drive
Alex S. Huaman1. Stephan Gorges1. Michael Katzschmann1. Steffen Hesse1. Thomas Fröhlich2. Eberhard Manske2.Euspen (European Society for Precision Engineering and Nanotechnology) – 22nd International Conference & Exhibition, 30 May – 3 June 2022, Geneva, Switzerland
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 2Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, 98693 Ilmenau, Germany.Nanometergenaue Hubmodule für die Präzisionsantriebstechnik
Stephan Gorges1.Konstruktion (2021) Nr. 11-12, Sonderteil Antriebstechnik, Seite 36 - 40, www.ingenieur.de/fachmedien/konstruktion/antriebstechnik/hubmodule-fuer-die-praezisionsantriebstechnik/
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control
Alex S. Huaman1. Michael Katzschmann1. Steffen Hesse1. Christoph Schäffel1. Christoph Weise2. Denis Dontsov3. Eberhard Manske2. Johann Reger2.2021 IEEE International Conference on Mechatronics (ICM2021), DOI: doi.org/10.1109/ICM46511.2021.9385699, 7 - 9 March 2021, Kashiwa, Japan
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 2Technische Universität Ilmenau, Germany. 3SIOS Meßtechnik GmbH, Germany.Nanopositioning and fabrication using the Nano Fabrication Machine with a positioning range up to ⊘100 mm
Jaqueline Stauffenberg1. Christoph Reuter1. Ingo Ortlepp1. Mathias Holz2. Denis Dontsov3. Christoph Schäffel4. Jens-Peter Zöllner1. Ivo Rangelow1. Steffen Strehle1. Eberhard Manske1.Proc. SPIE 11610, Novel Patterning Technologies 2021, 1161016 (22 February 2021); DOI: doi.org/10.1117/12.2583703
1Technische Universität Ilmenau, Germany. 2nano analytik GmbH, Germany. 3SIOS Meßtechnik GmbH, Germany. 4IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.
This might also be interesting for you
![[Translate to English:]](/fileadmin/_processed_/9/0/csm_20200731_IMG_2732_K4PNP-INPOS_SG_1920x1280_7c70c69f8a.jpg "[Translate to English:]")
Service for R&D
Development of mechatronic systems
We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.
Service for R&D
Finite Element Modeling
We support you in the concept and development phase of new products with calculations and simulations to shorten development times and improve product parameters such as weight & material savings or minimisation of natural vibrations.
Research field
Magnetic 6D direct drives with nm precision
To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.