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Technical Equipment

To permanently support our partners with state-of-the-art electronic system solutions, we are continuously exploring new production technology and partnerships for our R&D work. Furthermore, we are constantly expanding our technical laboratory and equipment infrastructure to remain competitive in the international scientific environment.

We have a wide range of equipment for design, characterisation and testing of the systems developed at the Institute and for testing services. The spectrum covers different levels – starting from material parameters, transistors and devices to complex applications.

Our technical laboratory and equipment infrastructure

  • Wafer prober for up to 12'' wafers
  • Test temperature: –60 °C ... 300 °C
  • Feeding of optical signals
  • Active Probes

  • PXI-based
  • Various instruments for analog mixed-signal test
  • Combinable with wafer prober
  • Test automation with LabView programs

  • Source Measurement Unit (SMU)
    • Voltages 0.5 µV – 200 V
    • Currents 0.1 fA – 1 A
  • Impedance analyzer
    • Frequency range 20 Hz - 120 MHz
  • Oscilloscopes
    • Up to 12 bit resolution
    • Up to 8 GHz bandwidth
    • 80 GSa/s Sampling rate

  • Optical power meter
  • Monochromatic light source from xenon light source with monochromator 200nm – 1100nm
  • Spectrometer
  • Time Tagger (time resolution 5 ps)
  • Optical bench (vibration damped)
  • Beam delivery systems
  • Laser sources (different wavelengths)
    • Pulse laser (FWHM 70 ps)
    • Modulated lasers (bandwidth up to 2 GHz)

  • Network analyzers 9 kHz - 50 GHz
  • Noise measurement equipment
  • Spectrum analyzers up to 26 GHz
  • Signal generators up to 6 GHz
  • RFID test system

  • Curve tracer 400 A (pulsed/30V)
  • SMU up to 10 kV
  • Artificial Mains Network

  • Voltage range up to 2.1 kV
  • Current range up to 40 A
  • ESD models HBM, TLP, MM

  • Heating chamber up to 350 °C
  • Climate chamber
    • Temperature range –40 °C – 150 °C
    • Rel. humidity 0 % – 100 %

  • Vibrometer
  • White-light interferometer

Infrastructure projects

TSN test lab

In the Time Sensitive Networking (TSN) laboratory we are exploring the technological limits to the creation of data-intensive industrial real-time applications.


In the MEMS-T-Lab, we take highly complex semi-automated measurements for complete MEMS wafers.


Research infrastructure for the next MEMS generation: 3D vibrometer system and new broadband amplifier



Dipl.-Ing. Michael Meister

Head of Industrial Electronics and Measurement Technology

michael.meister(at) (0) 3677 874 93 20

Michael Meister is your contact for testing services, the development of test methodologies, and long-term measurements. He answers your questions on Modular and mobile test systems that we develop in our research in Smart distributed measurement and test systems as well as about testing and characterisation of integrated sensor systems. He is responsible for the test equipment at IMMS and will support you in the validation of ASIC and MEMS developments.

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Core topic

Modular and mobile test systems

Test capabilities are an integral part of all application developments. We research modular test systems that can be adapted flexibly and quickly to new challenges through optimised functional test units.

Service for R&D

Test and characterisation

We test, characterise and qualify your circuits, sensors and systems. Based on our excellent pool of measurement equipment, we develop an individually adapted test environment for measurements on wafers and individual components.

Service for R&D

MEMS – simulation, design and test

As a design house for the open technology platform XMB-10 from X-FAB, we develop acceleration sensors according to your specification in a semi-automated design process.