Integrated sensor systems
- Integrated sensor systems
- CMOS-based biosensors
- ULP sensor systems
- AI-based design and test automation
Research field Integrated sensor systems
In the research field “Integrated sensor systems”, we investigate miniaturised systems manufactured in semiconductor technology consisting of microelectronic and/or microelectromechanical components for sensors applications, as well as methods to design these highly complex systems efficiently and safely.
Integrated sensor systems connect the analog with the digital world:
Electrical, mechanical and optical parameters can be directly detected, amplified, digitised and transmitted on these silicon chips with an edge length of just a few millimetres. They are mobile, energy-efficient, precise and powerful and therefore represent the key technology for the Internet-of-Things (IoT). Functionalised chip surfaces can be used to measure additional physical as well as chemical and biological parameters. With integrated sensor systems, structural sizes in the µm range can be achieved and thus properties can also be detected on a molecular scale, such as in the sequencing of DNA.
New applications and commercial technologies
We aim to pioneer new applications through functional integration and miniaturisation.
The goal of our research is always industrial exploitation. We therefore focus on system design with commercial semiconductor technology. Large quantities can be used here to achieve competitive and cost-effective solutions. In addition, IP protection and trustworthiness are strengthened.
Integrated sensor systems are incorporated into solutions for all target markets of IMMS. In the lead applications of sensor systems for in-vitro diagnostics and RFID sensors, we focus on the use of integrated sensor systems in life sciences as well as in automation technology and Industry 4.0 target markets.
Eric Schäfer, M. Sc.
Head of Microelectronics / Branch Office Erfurt
eric.schaefer(at)imms.de+49 (0) 361 663 25 35
Eric Schäfer and his team research Integrated sensor systems, especially CMOS-based biosensors, ULP sensor systems and AI-based design and test automation. The results are being incorporated into research on the lead applications Sensor systems for in-vitro diagnostics and RFID sensor technology. It will assist you with services for the development of Integrated circuits and with IC design methods.
The IMMS is developing a CMOS image sensor for time-resolved fluorescence detection for direct integration into microfluidic cartridges using 3D screen printing.
The IMMS is developing a SPAD-based sensor for time-resolved readout of fluorescence-labelled DNA microarrays.
We are researching the use of ultra-low power embedded memories in wireless sensor front-end ICs for monitoring the condition of wind turbines and individual plants produced in greenhouses.
IMMS researches image sensors for chemiluminescence assays with Thuringian industry and institutes from Erfurt-Südost and Jena
Dr. Katja Nicolai, IL Metronic
“From my point of view, the numerous outcomes, many of them already validated by demonstrators, speak for themselves. These wireless solutions with their energy self-sufficiency are blazing the trail for quick, cheap and easy retrofitting. I envisage their use not only in manufacturing processes but in other areas such as transport and logistics.”
Sylvo Jäger, microsensys GmbH
“For a number of years now, we have been appreciative of our cooperation with IMMS. The Institute is for us an innovative technological partner in our own geographical area, capable of supporting us not only in implementing various development tasks in the ASIC design field but also of coordinating joint projects which benefit from industrial and public subsidy.”
Dr. Friedrich Scholz, Senova
“IMMS demonstrated great commitment in responding to the huge challenges on the development of the point-of-care test. Our experience demonstrates that IMMS application-oriented analyses, understands and models the biochemical processes. Furthermore, the colleagues implement the specifications with their integrated system design and are flexible in adapting the systems as necessary.”
Machine-Learning im PCB-Entwurf: Open-Source zwischen Forschung, Potential und AlltagGeorg Gläser1.
30. Konferenz des Fachverbandes für Design, Leiterplatten- und Elektronikfertigung (FED), 29. - 30. September 2022, Potsdam, Germany1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.
An IoT-based Sensor System to Capture Flower Bud Growth in SpringSilvia Krug1. Tino Hutschenreuther1.
19. GI/ITG KuVS Fachgespräch Sensornetze (FGSN 2022), pp. 37-40, DOI: doi.org/10.34702/mncp-qb18. 15. September 2022, Berlin, Germany1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 2Mid Sweden University Sundsvall, Sweden.
The angle dependent ΔE effect in TiN/AlN/Ni micro cantileversBernd Hähnlein1. Maria Kellner2. Maximilian Krey3. Alireza Nikpourian2. Jörg Pezoldt4. Steffen Michael2. Hannes Töpfer3. Stefan Krischok1. Katja Tonisch1.
Sensors and Actuators A: Physical, Volume 345, 2022, 113784, ISSN 0924-4247, DOI: doi.org/10.1016/j.sna.2022.1137841FG Technische Physik 1, Institut für Mikro- und Nanotechnologien (IMN MacroNano(R)), Technische Universität Ilmenau, Postfach 100565, Ilmenau, 98684, Germany. 2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 3FG Theoretische Elektrotechnik, Institut für Mikro- und Nanotechnologien (IMN MacroNano(R)), Technische Universität Ilmenau, Postfach 100565, Ilmenau, 98684, Germany. 4FG Nanotechnologie, Institut für Mikro- und Nanotechnologien (IMN MacroNano(R)), Technische Universität Ilmenau, Postfach 100565, Ilmenau, 98684, Germany.
Lock-In Pixel CMOS Image Sensor for Time-Resolved Fluorescence Readout of Lateral-Flow AssaysAlexander Hofmann1. Benjamin Saft1. Peggy Reich1. Martin Grabmann1. Georg Gläser1. Max Trübenbach2. Alexander Rolapp1. Marco Reinhard1. Friedrich Scholz2. Eric Schäfer1.
IEEE Transactions on Biomedical Circuits and Systems, vol. 16, no. 4, pp. 535-544, Aug. 2022, DOI: doi.org/10.1109/TBCAS.2022.31929261IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 2Senova Gesellschaft für Biowissenschaft und Technik mbH, Germany.