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MEMS – simulation, design and test

As a design house for the open technology platform XMB-10 from X-FAB, we develop acceleration sensors according to your specification in a semi-automated design process. For the testing of MEMS, we focus on the vibrometric investigation of sensors. This includes functional tests, e.g. of resonators up to 1.2 GHz, as well as indirect parameter identification. From vibrometric measurement data and FE parameter calculations, material stresses of beam- and membrane-based sensors can be determined.

We have been supporting research institutes in the field of MEMS for a long time. In recent years, we have already been able to successfully transfer some of the research results into products of our industrial partners.

Based on experience from numerous research and customer projects we offer the following services.

Service offering

  • design, layout and test of acceleration sensors in XMB10 technology from X-FAB
    • development of customised 1D, 2D or 3D accelerometers based on customer specifications
    • execution of electrical tests
    • shock tests in cooperation with partners
  • FE simulation of cantilever-, beam- and membrane-based sensor structures with different operating principles
    • piezoresistive
    • piezoelectric
    • magnetostrictive
  • optimisation of sensor structures with respect to sensor parameters, such as sensitivity and non-linearity, taking into account technologically determined process tolerances
  • vibrometric investigations of MEMS
    • functional test, e.g. of resonators
    • indirect determination of material properties, e.g. material stresses
    • monitoring of material stress of membrane-based sensors over the entire manufacturing process from wafer level to packaging

Application fields and technical equipment

  • development of inertial sensors, e.g. TPMS for the automotive industry
  • medical technology

  • vibrometer measurement systems for frequencies up to 1.2Ghz
  • MEMS-Vibro-3D
  • MEMS-T-Lab



Dr.-Ing. Ludwig Herzog

Head of Mechatronics

ludwig.herzog(at) (0) 3677 874 93 60

Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.

Related content



Systematic design and economical manufacture for intelligent multi-sensor systems in small quantities



A procedure for in-line inspection of encapsulated MEMS silicon components



The IMMS tool automatically generates mechanical designs. MEMS can be simulated and verified as an entire system.


Prof. Dr.-Ing. Erich Barke

“The Erfurt branch of IMMS is involved in finding methods by which models can be efficiently simulated. Not only the excellent collaboration but also the publication success bring me much pleasure.”


Dr. Gisbert Hölzer, X-FAB

“For many years as we followed our ‘More-than-Moore’ roadmap, IMMS has been a support to us, acting as our most important research partner. The Institute melded together in sovereign fashion its skills in ASIC design and in micromechanics.”


Prof. Dr. Martin Hoffmann, Ilmenau TU

”IMMS made a significant contribution to the project on the basis of its expertise in finite element modelling, which for the MEMS elements supported not only static and dynamic simulation but also mode analysis.“

All publications MEMS – simulation, design and test

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Finite Element Modeling

We support you in the concept and development phase of new products with calculations and simulations to shorten development times and improve product parameters such as weight & material savings or minimisation of natural vibrations.

About us

Technical equipment

We use state-of-the-art technology for our R&D work. Among other things, we are permanently expanding our technical laboratory and equipment infrastructure to remain competitive in the international scientific environment.