iENA bronze medal for “Seal configuration for an interferometer route partially arranged in vacuum”
iENA inventors’ fair in Nürnberg, Germany, 4 to 7 November 2021; Thuringian awards event for the iENA competition at PATON – Patent Centre Thüringen, Technische Universität Ilmenau, 7 May 2022
Related content
Press release,
High-precision drives released from vacuum
PTB and IMMS receive iENA bronze medal for new seal configuration for more precise displacement measurement in high-tech applications
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Service for R&D
Development of mechatronic systems
We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.
Research field
Magnetic 6D direct drives with nm precision
To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.
Lead application
nm measurement and structuring of objects
To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.
Contact
Contact
Dr.-Ing. Ludwig Herzog
Head of Mechatronics
ludwig.herzog(at)imms.de+49 (0) 3677 874 93 60
Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.