Laser focus sensor for unconventional, lateral measurements of nanopositioning stages. Photograph: IMMS.

ICPE 2024

Date, Type of contribution, Location:

23 October 2024–27 October 2024,Talk,Sendai, Japan

Title:

Investigation of distance measurement reproducibility for a long-range nanopositioning machine combined with a laser focus sensor

Authors:

Davi Anders Brasil [1], Steffen Hesse [1], Michael Katzschmann [1], Ludwig Herzog [1], Thomas Fröhlich [2], Thomas Kissinger [2]

[1] IMMS

[2] Technische Universität Ilmenau

Event:

The 20th International Conference on Precision Engineering

Further information:

https://web.tohoku.ac.jp/icpe2024/index.html

Laser focus sensor for unconventional, lateral measurements of nanopositioning stages. Photograph: IMMS.

Related content

Project

NanoFab

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision…

Press release, 18 June 2020

Ready for Take-off – Vertikalantrieb für die 3D-Nanofertigung vorgestellt

IMMS-Doktorand verteidigt Promotion im DFG-Graduiertenkolleg NanoFab

Award

Best Paper Award für den Beitrag: Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control

Alex S. Huaman

Service for R&D

Development of mechatronic systems

We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.

Research field

Magnetic 6D direct drives with nm precision

To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.

High-precision drive systems with spatial (6D) positioning accuracies in the single-digit nm range.

Lead application

nm measurement and structuring of objects

To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.

Contact

Dipl.-Hdl. Dipl.-Des. Beate Hövelmans

Head of Corporate Communications

beate.hoevelmans(at)imms.de+49 (0) 3677 874 93 13

Beate Hövelmans is responsible for the text and image editorial work on this website, for the social media presence of IMMS on LinkedIn and YouTube, the annual reports, for press and media relations with regional and specialist media and other communication formats. She provides texts, photographs and video material for your reporting on IMMS, arranges contacts for interviews and is the contact person for events.

Back