Current Publication
Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS
K.Gastinger1.
K.H.Haugholt1.
M. Kujawinska2.
M.Jozwik2.
C. Schäffel3.
S. Beer4.
Paper 7389-56, SPIE Europe Optical Metrology, 14.- 18. Juni 2009, München
1SINTEF, Norway.
2Warsaw Univ. of Technology, Poland.
3IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.
4Ctr. Suisse d'Electronique et de Microtechnique SA, Switzerland.
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