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Best Paper Award für den Beitrag: Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control

Auszeichnung mit dem Best Paper Award auf der International Conference of Mechatronics, ICM, 7th-9th March 2021, Kashiwa, Japan
Date:
Award:
Best Paper Award für den Beitrag: Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control
Authors:
Alex S. Huaman1. Michael Katzschmann1. Steffen Hesse1. Christoph Schäffel1. Christoph Weise2. Denis Dontsov3. Eberhard Manske2. Johann Reger2.
Event:

2021 IEEE International Conference on Mechatronics (ICM2021), 7th-9th March 2021, Kashiwa, Japan

 
1IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany. 2Technische Universität Ilmenau, Germany. 3SIOS Meßtechnik GmbH, Germany.

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Contact

Contact

Dr.-Ing. Ludwig Herzog

Head of Mechatronics

ludwig.herzog(at)imms.de+49 (0) 3677 874 93 60

Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.

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