Best Paper Award für den Beitrag: Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control
2021 IEEE International Conference on Mechatronics (ICM2021), 7th-9th March 2021, Kashiwa, Japan
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100)
Jaqueline Stauffenberg1. Johannes Belkner1. Denis Dontsov2. Ludwig Herzog3. Steffen Hesse3. Ivo W Rangelow1,4. Ingo Ortlepp1. Thomas Kissinger1. Eberhard Manske1.2024 Meas. Sci. Technol. 35 085011, DOI: doi.org/10.1088/1361-6501/ad4668
1Institute for Process Measurement and Sensor Technology, Department for Mechanical Engineering, Gustav-Kirchhoff-Straße 1, Ilmenau, Germany. 2SIOS Meßtechnik GmbH, Am Vogelherd 46, 98693 Ilmenau, Germany. 3IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany. 4nano analytik GmbH, Ehrenbergstraße 1, 98693 Ilmenau, Germany.Unconventional, lateral measurements with laser focus sensors for nanopositioning stages
Davi Anders Brasil1. Michael Katzschmann1. Steffen Hesse1. Ludwig Herzog1. T. Fröhlich2. T. Kissinger2.euspen Special Interest Group Meeting, "Micro/Nano Manufacturing", 28. - 29. November 2023, Ilmenau, Germany
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany. 2Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Germany.Robust Adaptive Tracking Control for Highly Dynamic Nanoprecision Motion Systems
Alex S. Huaman1. Johann Reger2.in Engineering for a Changing World: Proceedings; 60th ISC, Ilmenau Scientific Colloquium, Technische Universität Ilmenau, September 04-08, 2023, Ilmenau. DOI: doi.org/10.22032/dbt.58700
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 2Control Engineering Group, Technische Universität Ilmenau, 98693 Ilmenau, Germany.Robust Adaptive Tracking Control of a 3D Vertical Motion System for Nanometer Precision Applications
Alex S. Huaman1. Johann Reger2.22nd IFAC World Congress, Yokohama, Japan, July 9-14, 2023, IFAC-PapersOnLine, Volume 56, Issue 2, 2023, Pages 5332-5339, ISSN 2405-8963, DOI: doi.org/10.1016/j.ifacol.2023.10.177.
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 2Control Engineering Group, Technische Universität Ilmenau, 98693 Ilmenau, P.O. Box 10-05-65, D-98684, Ilmenau, Germany.
Event,
euspen SIG: Micro/Nano Manufacturing 2023
euspen Special Interest Group Meeting: Micro/Nano Manufacturing 2023
Event,
euspen 2022
Euspen Special Interest Group Meeting: Precision Motion Systems & Control 15th – 16th November 2022
Press release,
Ready for Take-off – Vertikalantrieb für die 3D-Nanofertigung vorgestellt
IMMS-Doktorand verteidigt Promotion im DFG-Graduiertenkolleg NanoFab
Contact
Contact
Dr.-Ing. Ludwig Herzog
Head of Mechatronics
ludwig.herzog(at)imms.de+49 (0) 3677 874 93 60
Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.