euspen SIG: Micro/Nano Manufacturing 2023
Unconventional, lateral measurements with laser focus sensors for nanopositioning stages
D. A. Brasil [1], M. Katzschmann [1], S. Hesse [1], L. Herzog [1], T. Kissinger [2], T. Fröhlich [2]
[1] IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Germany
[2] Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Germany
The authors used a laser focus sensor, originally intended to measure the vertical distance from the sensor to an object, to also measure the lateral distances between structures of a 40 µm pitch cross grid using a nanometre positioning system. The positioning system can move a platform in six degrees of freedom within a planar travel range of ⌀ 200 mm and is referenced by differential laser interferometers. A 4 nm standard deviation of cross grid center positions has been achieved over a range of 4 mm for the X and Y directions in the short term, and less than 20 nm standard deviation in the long term. Height measurements are also possible at the same time.
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