Steffen Hesse, Michael Katzschmann, Alex S. Huaman, Stephan Gorges, Eberhard Manske,
’s-Hertogenbosch, Netherlands
2022
euspen – Special Interest Group Meeting: Precision Motion Systems & Control
For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.
The IMMS is developing a CMOS image sensor for time-resolved fluorescence detection for direct integration into microfluidic cartridges using 3D screen printing.
