Publications

Presentation of research results at the ESSCIRC conference in Venice. Photograph: IMMS.

Scientific publications

Here you will find all IMMS publications since 1997: peer-reviewed conference papers / journal contributions, journal articles, talks and poster presentations.

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Integrated Planar 6-DOF Nanopositioning System

Stephan Gorges¹. Steffen Hesse¹. Christoph Schäffel¹. I. Ortlepp². E. Manske². E. Langlotz². D. Dontsov³.

2019 11th IFAC Symposium on Nonlinear Control Systems (NOLCOS 2019), 4 - 6 September 2019, Vienna, Austria , IFAC-PapersOnLine, Volume 52, Issue 15, 2019, Pages 313-318, ISSN 2405-8963, DOI: doi.org/10.1016/j.ifacol.2019.11.693

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. ²Technische Universität Ilmenau, 98693 Ilmenau, Germany. ³SIOS Meßtechnik GmbH, 98693 Ilmenau, Germany.

Magnetic 6D-direct drives with nanometre precision Reviewed scientific article INPOS

Design and Modeling Approach for a Lifting and Actuating Unit for the Application in Nano-Precision Machines

Stephan Gorges¹. Steffen Hesse¹.

33rd Annual Meeting of the American Society for Precision Engineering (ASPE), 2018, 4-9 November 2018, Las Vegas, Nevada, USA

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.

Magnetic 6D-direct drives with nanometre precision Talk and poster presentation NanoFab INPOS

Towards alternative 3D nanofabrication in macroscopic working volumes

M. Kühnel¹. T. Fröhlich¹. R. Füßl¹. M. Hoffmann⁶. E. Manske¹. I. W. Rangelow². J. Reger³. C. Schäffel⁵. S. Sinzinger⁴. J-P. Zöllner³.

Meas. Sci. Technol. 29 (2018) 114002, DOI: doi.org/10.1088/1361-6501/aadb57

¹Institute for Process Measurement and Sensor Technology, Technische Universität Ilmenau, 98684 Ilmenau, PO Box 100565, Germany. ²Institute for Microelectronics and Nanoelectronics, Technische Universität Ilmenau, 98684 Ilmenau, PO Box 100565, Germany. ³Institute for Automation and Systems Engineering, Technische Universität Ilmenau, 98684 Ilmenau, PO Box 100565, Germany. ⁴Optical Engineering Department, Technische Universität Ilmenau, 98684 Ilmenau, PO Box 100565, Germany. ⁵IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. ⁶Ruhr-Universität Bochum, Lehrstuhl für Mikrosystemtechnik, Universitätsstraße 150, ID 05 / 441, 44801 Bochum, Germany.

Magnetic 6D-direct drives with nanometre precision Reviewed scientific article

Development of an Integrated Guiding and Actuation Element for High Dynamic Nanopositioning Systems

Stephan Gorges¹. Bianca Leistritz¹. Steffen Hesse¹. I. Ortlepp². G. Slotta³. Christoph Schäffel¹.

Ilmenau Scientific Colloquium 2017, Session 1.1 – Precision Measurement Technology, 11-15 September 2017, Ilmenau

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. ²Institut für Prozessmess- und Sensortechnik, TU Ilmenau. ³AeroLas GmbH.

Magnetic 6D-direct drives with nanometre precision Talk and poster presentation AFiA INPOS

6D planar magnetic levitation system - PIMag 6D

Christoph Schäffel¹. Michael Katzschmann¹. Hans-Ulrich Mohr¹. Rainer Glöss². Christian Rudolf². Carolin Walenda².

JSME Mechanical Engineering Journal, Vol. 3 (2016) No. 1 p. 15-00111, The Japan Society of Mechanical Engineers, DOI: doi.org/10.1299/mej.15-00111

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, D-98693 Ilmenau, Germany. ²Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany.

Magnetic 6D-direct drives with nanometre precision Reviewed scientific article Mag6D

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