IMMS - Operation and performance evaluation of vertical nanopositioners for 10 mm stroke in a 3D lift and tilt test setup

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Operation and performance evaluation of vertical nanopositioners for 10 mm stroke in a 3D lift and tilt test setup

Steffen Hesse¹. Michael Katzschmann¹. Alex S. Huaman¹. Stephan Gorges¹. Eberhard Manske².

euspen – Special Interest Group Meeting: Precision Motion Systems & Control, 15th – 16th November 2022, s-Hertogenbosch, The Netherlands, NL

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. ²Institut für Prozessmess- und Sensortechnik, Technische Universität Ilmenau, Ilmenau, Germany.

Magnetic 6D-direct drives with nanometre precision Talk and poster presentation

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NanoFab

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.

Award

iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"

Alex S. Huaman

Award

Best Paper Award für den Beitrag: Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control

Alex S. Huaman

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