Tip-based nanofabrication below 40 nm combined with a nanopositioning machine with a movement range of Ø100 mm

Jaqueline Stauffenberg¹. Michael Reibe¹. Anja Krötschl². Christoph Reuter². Ingo Ortlepp^1,2. Denis Dontsov³. Steffen Hesse⁴. Ivo W. Rangelow^1,5. Steffen Strehle². Eberhard Manske¹.

Micro and Nano Engineering, Volume 19, 2023, 100201, ISSN 2590-0072, DOI: doi.org/10.1016/j.mne.2023.100201

¹Institute of Process Measurement and Sensor Technology, Production and Precision Measurement Technology Group, Technische Universität Ilmenau, Gustav-Kirchhoff-Straße 1, Ilmenau 98693, Thuringia, Germany. ²Institute of Micro- and Nanotechnologies, Microsystems Technology Group, Technische Universität Ilmenau, Max-Planck-Ring 12, Ilmenau 98693, Thuringia, Germany. ³SIOS Meßtechnik GmbH, Am Vogelherd 46, Ilmenau 98693, Thuringia, Germany. ⁴IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. ⁵nano analytik GmbH, Ehrenbergstraße 3, Ilmenau 98693, Thuringia, Germany.

Magnetic 6D-direct drives with nanometre precision Reviewed scientific article

Related content

High-precision drive systems with spatial (6D) positioning accuracies in the single-digit nm range.

Project

NFM-100

For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.

Project

NanoFab

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.