46 results
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Investigation of long-term distance measurement repeatability in a large-range nanopositioning machine combined with a laser focus sensor
Davi Anders Brasil1. Michael Katzschmann1. Steffen Hesse1. Ludwig Herzog1. Eberhard Manske2. Thomas Fröhlich2. Thomas Kissinger2.2026 Meas. Sci. Technol. 37 245005, DOI: doi.org/10.1088/1361-6501/ae76221IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. 2Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Ilmenau, Germany. -
Hybrid Characterization and Reconstruction of Transient Thermal Fields in 6-DOF Nanopositioning Systems
Parastoo Salimitari1. Ina Naujokat1. Ahmed Rahat1. Amin Suaad1. Ludwig Herzog1. Tino Hutschenreuther1.2026 PI Symposium on Mechatronics System Design, June 16-17, 2026, Karlsruhe, Germany1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany.. -
From Tracking Error to Accuracy – Error Budgeting and Compensation Approaches in Long-Range Nanopositioning Systems
Ludwig Herzog1.2026 PI Symposium on Mechatronics System Design, June 16-17, 2026, Karlsruhe, Germany1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. -
Von hoher Dynamik und ultra-hoher Präzision: Positioniersystem-Entwicklung am IMMS
Ludwig Herzog.Jahrestagung der Forschungsgemeinschaft Ultrapräzisionstechnik, Mai 28-29, 2026, Aachen1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. -
Challenges of Building AI-Based Virtual Temperature Sensors for Nanopositioning Systems (NPS)
Amin Suaad1. Silvia Krug1, 2. Tino Hutschenreuther1.IEEE AI4IM 2026, IEEE Symposium on Artificial Intelligence for Instrumentation and Measurement, Mai 21-23, 2026, Amalfi, Italy1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. 2Department of Computer and Electrical Engineering, Mid Sweden University, Holmgatan 10, 851 70 Sundsvall, Sweden. -
Determination of yaw angle of mirror origin in a 6-DOF nanopositioning stage
Davi Anders Brasil1. Michael Katzschmann1. Steffen Hesse1. Ludwig Herzog1. Thomas Kissinger2. Thomas Fröhlich2.International Scientific Symposium on World Interferometry Day 2026, 20. April 2026, Ilmenau, Germany1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. 2Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Germany. -
Thermal Analysis of a Coil Assembly in a Nanopositioning Drive System via Reduced-Complexity CFD Modeling
Ina Naujokat1. Ludwig Herzog1. Steffen Hesse1. Parastoo Salimitari1.Applied Sciences 2026, 16, 2748. DOI: doi.org/10.3390/app160627481IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. -
Experimental characterization of thermal disturbances in a 6DOF nanopositioning system under varying operational conditions
Parastoo Salimitari1. Steffen Hesse1. Michael Katzschmann1. Ludwig Herzog1.Euspen Special Interest Conference: Precision & Performance 2025, Proceedings: www.euspen.eu/euspen-knowledge-base/proceedings-search/, November 18-20, 2025, Cranfield University, United Kingdom1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. -
Development and validation of a simplified coil model for CFD simulation of a nano-positioning planar drive system
Ina Naujokat1. Ludwig Herzog1. Steffen Hesse1. Parastoo Salimitari1.Euspen Special Interest Conference: Precision & Performance 2025, Proceedings: www.euspen.eu/euspen-knowledge-base/proceedings-search/, November 18-20, 2025, Cranfield University, United Kingdom1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. -
Sensor for Picometer-Scale Positioning in Vacuum – Demonstration of an IDS3010-Based Ultra-Precise Closed-loop Linear Drive System
Markus Øverland1. Gregor Schindler1. Alex S. Huaman2. Ludwig Herzog2.Technical Note: Motion & Sensing 15, attocube systems GmbH. V10/25. PDF: marketing.attocube.com/acton/attachment/4434/f-ed569c35-99d8-435b-b87f-8f6a30a97ca2/1/-/-/-/-/TechNote_MAS-15_Sensor%20for%20Picometer-Scale%20Positioning%20in%20Vacuum.pdf1attocube systems GmbH, Eglfinger Weg 2, 85540 Haar, Germany. 2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany.