Investigations on the Tracking Control and Performance of a Long Stroke Vertical Nanopositioning Drive

Current Publication

Investigations on the Tracking Control and Performance of a Long Stroke Vertical Nanopositioning Drive

Alex S. Huaman¹. Stephan Gorges¹. Michael Katzschmann¹. Steffen Hesse¹. Thomas Fröhlich². Eberhard Manske².

Euspen (European Society for Precision Engineering and Nanotechnology) – 22nd International Conference & Exhibition, 30 May – 3 June 2022, Geneva, Switzerland

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. ²Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, 98693 Ilmenau, Germany.

Magnetic 6D-direct drives with nanometre precision Talk and poster presentation

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Project

NanoFab

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.