Current Publication
NPS6D200: Long-Range-6D-Nanopositionierung mit interferometrischem Feedback für das Closed-Loop-Regelungssystem
Steffen Hesse1.
Experten-Tag für Präzisionsmesstechnik, 28. - 29. Oktober 2025, bei SIOS Meßtechnik GmbH, Ilmenau, Germany
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.
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Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award