IMMS - A virtual metrology frame test setup using fiber interferometric sensors

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A virtual metrology frame test setup using fiber interferometric sensors

Davi Anders Brasil¹, Steffen Hesse¹, Ludwig Herzog¹, Thomas Fröhlich², Thomas Kissinger²

22nd International Metrology Congress (CIM 2025), 11 March 2025 – 14 March 2025, Lyon, France

¹IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, ²Technische Universität Ilmenau, Fakultät Maschinenbau, Institut für Prozessmess- und Sensortechnik, Ehrenbergstraße 29, 98693 Ilmenau, Germany

Magnetic 6D-direct drives with nanometre precision Talk and poster presentation

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Close-up of the quartz glass slider with a metal lifting module, magnetic bridges and laser interferometer.

Project

NanoFab

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.

Award

iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"

Alex S. Huaman

Award

Best Paper Award für den Beitrag: Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control

Alex S. Huaman

Research

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