Michael Muth, AeroLas
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“We have for many years been appreciative of our cooperation with IMMS. The results from this project will be the basis of product design to the specification of future AeroLas customers. IMMS will likewise be an important partner for us in future developments because of its outstanding expertise in the field of magnetic drives.“
„At AeroLas, we have been pursuing a new R&D idea in the field of aerostatic guides in a joint project with IMMS and Ilmenau TU. The result of this highly successful cooperation has been a compact vertical drive element with integrated magnetic vertical actuator and reliance on compressed air, not electricity, for the weight compensation. This active guiding element means that the position in the vertical can be controlled with nanometre-precision while the load is being carried with virtually none of the power loss which might occasion problems due to warming.
Elements like this are of particular interest for drive systems requiring perfect positioning and measurement on the nanometre scale, features that are necessary in display manufacture or optical measurement of reticles and wafers.
We have for many years been appreciative of our cooperation with IMMS, their focused attitude to the work and their professionalism. The results from this project will be the basis of product design to the specification of future AeroLas customers. IMMS will likewise be an important partner for us in future developments because of its outstanding expertise in the field of magnetic drives.“
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Service for R&D
Development of mechatronic systems
We develop actuator systems and open- and closed-loop controls as embedded solutions according to customer specifications with highest demands on precision, dynamics, available space, performance and efficiency.
Research field
Magnetic 6D direct drives with nm precision
To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.
Lead application
nm measurement and structuring of objects
To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.
Project
AFiA
IMMS has developed a vertical drive to raise and lower objects through 10 mm under active control with nanometre precision.
Contact
Contact
Dr.-Ing. Ludwig Herzog
Head of Mechatronics
ludwig.herzog(at)imms.de+49 (0) 3677 874 93 60
Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.