MEMS (micro-electro-mechanical systems) are one of the keys to innovative manufacture of plant and equipment. As such, they are an element of the Industry 4.0 strategic project. MEMS are being developed at enormous rates with quantities and revenues going into the billions worldwide. One of the aims of the MEMS2015 project was the combination and harmonisation of the design process for the mechanical and the electronic components of MEMS. A newly developed type of comprehensive design methodology can be expected to enable SMEs to compose their own individual, tailor-made solutions using a flexible MEMS and electronics construction kit so that they can capture a share of the MEMS boom.

The new systematic methodology IMMS developed was validated by a MEMS accelerometer. Furthermore, IMMS staff has developed a micro-chip for a MEMS module, integrating the knowledge it brought them into the new methodology.

There is a need for new procedures and tools in the field of MEMS design to enable smart, up-to-date, high-performance sensor-and-actuator systems to be developed. The tried and trusted modular principle from microelectronic design has been adopted by the Institute and transferred to mechanical systems and to MEMS. The two design procedures have been combined into a systematic start-to-finish procedure. As a result, MEMS can now be simulated and verified as an entire system, which means that errors can be recognised and remedied early.

One outcome is a special design tool that supports XM-SC, the SOI technology of X-FAB AG, by providing a sensor design system for computer-aided design of the electromechanical unidimensional sensors known as accelerometers. In future, it is hoped that small and medium-sized enterprises (SMEs) will be able to use the system to design their own MEMS without possessing much design experience. The tool works by using a mathematical algorithm developed at IMMS to compute the various design possibilities that might match the customer's requirements. The tool is, furthermore, a source of sensor models which the user can integrate into the design tools made by our research partners Coventor and Cadence. It will generate the necessary mechanical layouts for the manufacturing stage.

In validation of this new methodology and the new tool, IMMS has used the content of the new tool to design an accelerometer (acceleration sensor with high-precision signal evaluation) and then characterise it after fabrication.

In the RoMulus project, the design tool (originally for a unidimensional sensor) has been extended to 2- and 3-dimensional inertial sensors.

There is a need for new procedures and tools in the field of MEMS design to enable smart, up-to-date, high-performance sensor-and-actuator systems to be developed. The tried and trusted modular principle from microelectronic design has been adopted by the Institute and transferred to mechanical systems and to MEMS. The two design procedures have been combined into a systematic start-to-finish procedure. As a result, MEMS can now be simulated and verified as an entire system, which means that errors can be recognised and remedied early.

One outcome is a special design tool that supports XM-SC, the SOI technology of X-FAB AG, by providing a sensor design system for computer-aided design of the electromechanical unidimensional sensors known as accelerometers. In future, it is hoped that small and medium-sized enterprises (SMEs) will be able to use the system to design their own MEMS without possessing much design experience. The tool works by using a mathematical algorithm developed at IMMS to compute the various design possibilities that might match the customer's requirements. The tool is, furthermore, a source of sensor models which the user can integrate into the design tools made by our research partners Coventor and Cadence. It will generate the necessary mechanical layouts for the manufacturing stage.

In validation of this new methodology and the new tool, IMMS has used the content of the new tool to design an accelerometer (acceleration sensor with high-precision signal evaluation) and then characterise it after fabrication.