IMMS - Using WiCkeD in MEMS Design

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Using WiCkeD in MEMS Design

Volker Boos¹.

MunEDA User Group Meeting, München, 10.10.2013-11.10.2013

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.

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MEMS2015

The IMMS tool automatically generates mechanical designs. MEMS can be simulated and verified as an entire system.

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Best Paper Award Runner-Up für den Beitrag: Systematic MEMS ASIC Design Flow using the Example of an Acceleration Sensor

Jenny Klaus

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