IMMS - Schematic Driven MEMS Design

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Schematic Driven MEMS Design

Ralf Sommer¹.

edaWorkshop, Dresden, 14.05.2013-16.05.2013

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.

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MEMS2015

The IMMS tool automatically generates mechanical designs. MEMS can be simulated and verified as an entire system.

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Best Paper Award Runner-Up für den Beitrag: Systematic MEMS ASIC Design Flow using the Example of an Acceleration Sensor

Jenny Klaus

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