Skip to main content

Press releases

Best Paper Award Runner-Up for MEMS-ASIC-Gesamtdesignmethodik

Implemented acceleration sensor to validate the novel method

At the ”13th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design” (SMACD 2016) on June 30th in Sevilla, Spain, IMMS received the Best Paper Award Runner-Up for their contribution “Systematic MEMS ASIC Design Flow using the Example of an Acceleration Sensor”. The honoured work is an outcome of the MEMS2015 research project which ended in 2015. In this project IMMS developed an approach that would combine and harmonise into a single whole the design of the mechanical and the electronic components of MEMS. Thanks to this novel composite design methodology, a MEMS can now be simulated and verified as a single unified system, so that errors can be recognised and remedied early. 

The design tool is a vital element in our work on computer-aided design of electromechanical sensors. This is software which was first created for unidimensional acceleration sensors in XM-SC, the SOI technology of X-FAB AG. The tool works on the basis of an algorithm developed by IMMS to compute the various mechanical design possibilities likely to match the customer's requirements. The tool is, furthermore, a resource providing sensor models which can be integrated into established design tools. It will generate the necessary mask layouts for the manufacturing stage.

In validation of this new methodology and the new tool, IMMS has used the content of the new tool to design an accelerometer (acceleration sensor with high-precision signal evaluation) and then characterise it after fabrication. In the context of the RoMulus project which began in 2015, the design tool (originally for a unidimensional sensor) is being extended to 2- and 3-dimensional sensors.

Honoured work: Dr. Jenny Klaus, Roman Paris, Prof. Dr. Ralf Sommer: Systematic MEMS ASIC Design Flow using the Example of an Acceleration Sensor.

Funding

The MEMS2015 project was funded by the BMBF (German Ministry of Education and Research) in its IKT 2020 programme, with the reference 16M3093.

Funding

The RoMulus project has been supported within the Research Programme ICT 2020 by the German Federal Ministry of Education and Research (BMBF) under the reference 16ES0362.

Related content

Project

RoMulus

Systematic design and economical manufacture for intelligent multi-sensor systems in small quantities

Project

MEMS2015

The IMMS tool automatically generates mechanical designs. MEMS can be simulated and verified as an entire system.

Event,

Analog 2020

Zwei Vorträge auf der 17. ITG/GMM-Fachtagung Analog 2020, Analoge Schaltungen: Schlüsselsysteme für Automotive, IoT und zukünftige drahtlose…

Event,

TuZ 2020

32. GI/GMM/ITG-Workshop Testmethoden und Zuverlässigkeit von Schaltungen und Systemen

Event,

elmug4future 2019

Two presentations at the Technology Conference on Condition, Health and Quality Monitoring – Sensors, Methods and Applications

Event,

SMACD + PRIME 2019

5 lectures at the International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design and one lecture…

Award

Best Paper Award Runner-Up für den Beitrag: Systematic MEMS ASIC Design Flow using the Example of an Acceleration Sensor

Jenny Klaus

Contact

Contact

Dipl.-Hdl. Dipl.-Des. Beate Hövelmans

Head of Corporate Communications

beate.hoevelmans(at)imms.de+49 (0) 3677 874 93 13

Beate Hövelmans is responsible for the text and image editorial work on this website, for the social media presence of IMMS on LinkedIn and YouTube, the annual reports, for press and media relations with regional and specialist media and other communication formats. She provides texts, photographs and video material for your reporting on IMMS, arranges contacts for interviews and is the contact person for events.

Back