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1746 Ergebnisse
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1173.
SMARTIEHS - The interferometric test station for parallel inspection of MEMS and MOEMS
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1174.
Planar Magnetic Drives and Bearings for Multi-Axis Nanopositioning Machines with Large Travel Ranges.
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1176.
Realisierung eines PDICs für 12fach Blu-ray-Disc-RW Laufwerke mit Hilfe neuartiger effizienter Entwurfsmethodiken
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1177.
First results of an interferometric controlled planar positioning system for 100 mm with zerodur slider
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1178.
Optical, mechanical and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS