Nominierung für den Innovationspreis Thüringen 2012 in der Kategorie INDUSTRIE & MATERIAL: Planarer magnetischer 6D-Direktantrieb für Nanometer-Positionierung
XV. Innovationspreis Thüringen, 2012, Erfurt
Related content
Project
Mag6D
Within the project a novel planar drive system was developed which is magnetically guided and moves objects with nanometer precision.
6D planar magnetic levitation system - PIMag 6D
Christoph Schäffel1, Michael Katzschmann1, Hans-Ulrich Mohr1, Rainer Gloess2, Christian Rudolf2, Carolin Walenda2in JSME Mechanical Engineering Journal, vol. 3, no. 1, pp. 15-00111, 2016, DOI: doi.org/10.1299/mej.15-001111IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 2Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany6D Planar Magnetic Levitation System – Mag6D
Christoph Schäffel1, Michael Katzschmann1, Hans-Ulrich Mohr1, Rainer Gloess2, Christian Rudolf2, Christopher Mock2, Carolin Walenda2in Proceedings of ISMB14, 14th International Symposium on Magnetic Bearings, , Linz, Austria, https://www.magneticbearings.org/publication/detail/ismb14_17/1IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 2Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, GermanyPlanar Magnetic 6D Levitating system with Compact Sensor
Christoph Schäffel1. Michael Katzschmann1. Hans-Ulrich Mohr1. Rainer Glöß2. Christian Rudolf2. Christopher Mock2. Carolin Walenda2. R. Liang2.27th Annual Meeting of the American Society for Precision Engineering (ASPE), 2012, in Proceedings, ISBN 978-1-887706-61-2, p. 99-102
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau. 2Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany.Article6D Magnetic Levitation Positioning System with Compact Integrated 6D Sensor
C. Rudolf1. C. Mock1. C. Walenda1. R. Glöss1. R. Liang1. C. Schäffel2. M. Katzschmann2. H.-U. Mohr2.12th EUSPEN International Conference, 2012, in Proceedings P7.04 Vol II, ISBN 978-0-9566790-0-0
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau. 2Physik instrumente Karlsruhe Germany.Article
Patent
DE 10 2010 014 663
Device for determining the position of a rotor element in a planar drive and similar motion system
Press release,
IMMS für den Innovationspreis Thüringen 2012 nominiert
Contact
Contact
Dr.-Ing. Ludwig Herzog
Head of Mechatronics
ludwig.herzog(at)imms.de+49 (0) 3677 874 93 60
Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.