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Current Publication

6D Planar Magnetic Levitation System – Mag6D

Christoph Schäffel1. Michael Katzschmann1. Hans-Ulrich Mohr1. Rainer Gloess2. Christian Rudolf2. Christopher Mock2. Carolin Walenda2.

14th International Symposium on Magnetic Bearings, Linz, Austria, www.magneticbearings.org/publications/

1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, D-98693 Ilmenau, Germany. 2Physik Instrumente (PI) GmbH & Co. KG, D-76228 Karlsruhe, Germany.

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Project

Mag6D

Within the project a novel planar drive system was developed which is magnetically guided and moves objects with nanometer precision.


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