Current Publication
6D planar magnetic levitation system - PIMag 6D
Christoph Schäffel1, Michael Katzschmann1, Hans-Ulrich Mohr1, Rainer Gloess2, Christian Rudolf2, Carolin Walenda2
in JSME Mechanical Engineering Journal, vol. 3, no. 1, pp. 15-00111, 2016, DOI: doi.org/10.1299/mej.15-00111
1IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 2Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany
Related content
Project
Mag6D
Within the project a novel planar drive system was developed which is magnetically guided and moves objects with nanometer precision.
Award