Patent DE 10 2010 014 663
Device for determining the position of a rotor element in a planar drive and similar motion system
Device for determining the position of a rotor element in a planar drive and similar movement system,
- comprising a compact sensor measuring head (8) with sensor elements (1, 2, 3, 4, 5, 6, 7) arranged on a sensor carrier (8a) for detecting movements of the rotor element in three translational degrees of freedom (x, y, z) and three rotational degrees of freedom (rx, ry, rz) as well as
- an incremental surface scale (9) moved relative to the sensor measuring head, scanned by the sensor elements and arranged opposite the sensor elements,
characterised in that a first sensor element (1), a second sensor element (2) and a third sensor element (3) are in the form of a first pair of elements (1a, 1b), a second pair of elements (2a, 2b) and a third pair of elements (3a, 3b), a seventh sensor element (7) is in the form of a multiple element (7a, 7b, 7c), wherein the multiple element (7a, 7b, 7c) is evenly distributed on a first scanning circuit (K1), the first pairs of elements (1a, 1b) and third pairs of elements (3a, 3b) are arranged evenly on a second scanning circuit (K2) in the form of individual elements located opposite one another in each case, and the first scanning circuit (K1) and the second scanning circuit (K2) have a common scanning centre (13).
Features, advantages:
- direct, non-contact 6D position determination of the moving part of a high-precision positioning system
- all sensor elements are spatially close to each other and measure the displacement of one and the same monolithic object, e.g. a cross grid with coating, thus short metrological chains and minimisation of interferences on the position determination
- No sensor-related supply lines to the moving part required
- Higher accuracy of position detection compared to a serially stacked measuring arrangement
These advantages come into play with
- 6D controlled nanopositioning systems with a large planar working range and an additional vertical adjustment of the moving slider
- Magnetic 6D direct drives with nm precision and nm measurement and structuring of objects
Patent No.:DE 10 2010 014 663
Inventor:Christoph Schäffel. Hans-Ulrich Mohr. Dominik Karolewski. Steffen Hesse. Michael Katzschmann
Application:
High-precision nanopositioning| nm measurement and structuring of objects| application or production of high-precision measurement and production technology systems (e.g. semiconductor/microelectronics production)Research field:Magnetic 6D-direct drives with nanometre precision
granted patent
Application date:12 April 2010
Date of first publication:21 Juli 2011
Date of publication of grant:30 April 2015
Related content
Award
Nominierung für den Innovationspreis Thüringen 2012 in der Kategorie INDUSTRIE & MATERIAL: Planarer magnetischer 6D-Direktantrieb für Nanometer-Positionierung
IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH Ilmenau
Project
Mag6D
Within the project a novel planar drive system was developed which is magnetically guided and moves objects with nanometer precision.
Press release,
IMMS für den Innovationspreis Thüringen 2012 nominiert
6D planar magnetic levitation system - PIMag 6D
Christoph Schäffel1. Michael Katzschmann1. Hans-Ulrich Mohr1. Rainer Glöss2. Christian Rudolf2. Carolin Walenda2.JSME Mechanical Engineering Journal, Vol. 3 (2016) No. 1 p. 15-00111, The Japan Society of Mechanical Engineers, DOI: doi.org/10.1299/mej.15-00111
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, D-98693 Ilmenau, Germany. 2Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany.6D Planar Magnetic Levitation System – Mag6D
Christoph Schäffel1. Michael Katzschmann1. Hans-Ulrich Mohr1. Rainer Gloess2. Christian Rudolf2. Christopher Mock2. Carolin Walenda2.14th International Symposium on Magnetic Bearings, Linz, Austria, www.magneticbearings.org/publications/
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, D-98693 Ilmenau, Germany. 2Physik Instrumente (PI) GmbH & Co. KG, D-76228 Karlsruhe, Germany.Planar Magnetic 6D Levitating system with Compact Sensor
Christoph Schäffel1. Michael Katzschmann1. Hans-Ulrich Mohr1. Rainer Glöß2. Christian Rudolf2. Christopher Mock2. Carolin Walenda2. R. Liang2.27th Annual Meeting of the American Society for Precision Engineering (ASPE), 2012, in Proceedings, ISBN 978-1-887706-61-2, p. 99-102
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau. 2Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany.Article6D Magnetic Levitation Positioning System with Compact Integrated 6D Sensor
C. Rudolf1. C. Mock1. C. Walenda1. R. Glöss1. R. Liang1. C. Schäffel2. M. Katzschmann2. H.-U. Mohr2.12th EUSPEN International Conference, 2012, in Proceedings P7.04 Vol II, ISBN 978-0-9566790-0-0
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau. 2Physik instrumente Karlsruhe Germany.Article
Contact
Contact
Dr.-Ing. Ludwig Herzog
Head of Mechatronics
ludwig.herzog(at)imms.de+49 (0) 3677 874 93 60
Dr. Ludwig Herzog will provide detail on our research on magnetic 6D direct drives with nm precision for the nm measurement and structuring of objects. He supports you with services for the development of mechatronic systems, for simulation, design and test of MEMS as well as for finite element modelling (FEM) and simulation.
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Research field
Magnetic 6D direct drives with nm precision
To enable the manufacturing of macroscopic high-tech products with microscopic precision, we are researching scientific principles and technical solutions for nanopositioning systems for large motion ranges.
Lead application
nm measurement and structuring of objects
To be able to manufacture the ever-increasing complexity of integrated systems on ever-smaller semiconductor surfaces, for example, we are researching ever more precise drives for the nanometre measurement and structuring of objects.