Setup of an aerostatically guided nanopositioning axis for high-vacuum applications. Photograph: IMMS.

Experimental setup for investigations of mineral cast as a base for nanopositioning systems. Photograph: IMMS.

Using its NPS6D200 positioning system as an example, IMMS has demonstrated that a laser focus sensor for lateral distance measurement can be used for characterising nanopositioning systems. Photograph: IMMS.

euspen SIC 2026

Date, Type of contribution, Location:

17 November 2026–18 November 2026,Talk,'s-Hertogenbosch (NL)

Title:

I) Optical detection of registration marks with a laser focus sensor and the NPS6D200 nanopositioning system

II) Displacement Measurement and Anisotropy Investigations of Mineral Cast as a Base for Nanopositioning Systems

III) Realization and characteristics of an aerostatically guided nanopositioning axis for high-vacuum applications

Authors:

I) Steffen Hesse (1), Michael Katzschmann (1), Davi Anders Brasil (1), Ludwig Herzog (1), Denis Dontsov (2), Ilko Rahneberg (2)

II) Ina Naujokat, Neenu Sebastian, Parastoo Salimitari, Ludwig Herzog

III) Ludwig Herzog (1), Martin Assing (1), Steffen Hesse (1), Denis Dontsov (2), Georg Slotta (3)

(1) IMMS | (2) SIOS Meßtechnik | (3) Aerolas GmbH

Event:

Special Interest Conference: Precision Motion Systems & Control

Further information:

https://www.euspen.eu/events/sic-precision-motion-systems-control-17th-18th-november-2026/

Assembly using various metal rails and plastic tubes.

A wired cast mineral cylinder next to measuring instruments and monitors.

Using its NPS6D200 positioning system as an example, IMMS has demonstrated that a laser focus sensor for lateral distance measurement can be used for characterising nanopositioning systems. Photograph: IMMS.

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Contact

Dipl.-Hdl. Dipl.-Des. Beate Hövelmans

Head of Corporate Communications

beate.hoevelmans(at)imms.de+49 (0) 3677 874 93 13

Beate Hövelmans is responsible for the text and image editorial work on this website, for the social media presence of IMMS on LinkedIn and YouTube, the annual reports, for press and media relations with regional and specialist media and other communication formats. She provides texts, photographs and video material for your reporting on IMMS, arranges contacts for interviews and is the contact person for events.

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