Current Publication
Characterizing Dynamics of MEMS Devices on Wafer Level Using Optical Measurement Techniques
Sebastian Giessmann1.
Steffen Michael2.
Eric Lawrence3.
Dr. Heinrich Steger4.
Commercial Micro Manufacturing International Magazine (CMM Magazine), 08-2023, VOL 16 NO. 3, pp. 30-39
1MPI Corporation.
2IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.
3Polytec, Inc..
4Polytec GmbH.