Current Publication
Vibrometry in the Field of MEMS – Application Examples from Stress to Quality Factor Identification
Steffen Michael1.
CiS-Workshop "Simulation und Design", 26. September 2023, Erfurt, Germany
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.