Bojan Dimitrijević,
Bojana Nikolić
Slavoljub Aleksić
Nebojša Raičević
Hannes Toepfer
Elena Chervakova
Tino Hutschenreuther
12th International Conference on Applied Electromagnetics, August 31- September 02, 2015, Niš, Serbia, ELEKTROTECHNICA & ELEKTRONICA E+E Vol. 50. No 9-10/2015, Pages 23-27, ISSN 0861-4717
Elena Chervakova,
Marco Götze
Tino Hutschenreuther
Hannes Toepfer
Bojana Nikolic
Bojan Dimitrijevic
12th International Conference on Applied Electromagnetics, August 31- September 02, 2015, Niš, Serbia, ELEKTROTECHNICA & ELEKTRONICA E+E Vol. 50. No 9-10/2015, Pages 2-6, ISSN 0861-4717
2012 Jahresbericht | Nominierung für den Innovationspreis Thüringen
TESTIM ONI ALS IMMS nominated for Thüringen’s 2012 Innovation Prize for magnetic levitation direct drive Having been nominated for the Thüringen Innovation Prize in 2012, IMMS was among the top three competitors in the “Industry and Materials” category. The direct drive is a positioning system completely controlled by magnetism and permitting a load to be swayed accurately through six coordinates. The IMMS made up of optical and capacitive detectors. Conventional sensors have to date worked on the laser interferometry…
2010 Jahresbericht | Fachartikel SMARTIEHS (en/de)
15 Optimized Test of MEMS Hence, as an example, the whole conception of the nic control system on a substratum respectively on The fabrication processes of MEMS require a se- the components of the project partners. Another a chip. Mostly their size is only a few micrometers quence of test steps for the monitoring of quality subtask is the development of the regulation of the (example see figure 1). These tiny systems have un- and for the safeguarding of performance parame- scanning unit. But IMMS brings in already existing …
2008 Jahresbericht | Fachartikel SFB622 (de/en)
Planarmotorkonzept für die Positionierung mit Nanometerpräzision Planar Motor Concept for Positioning with Nanometer Precision Einleitung Introduction Das Erreichen von Unsicherheiten im Bereich weniger Nanometer in Verbindung mit einem Verfahrbereich von einigen 100 mm - das ist eine Zielstellung, die Forschergruppen weltweit beschäftigt. Positioning systems with uncertainties of just a few nanometers and travel ranges of 100 mm and higher - this is the ambition of many R&D institutes throughout the world. As a part of SFB 622, IMMS is…
2010 Jahresbericht | Fachartikel SFB622 (en/de)
15 3D POSITIONING SYSTEM IN THE RANGE OF NANOMETERS Collaborative Research Center 622 “NanoPositioning and NanoMeasuring Machines” IMMS had collaborated, in the part project A5, consiso, it is the aim of the operation of IMMS, to research Planar Air-guided Direct Drive System forces. The x-, y-position of the slider as well as the Minimization of Disturbances the basics of designing nanopositioning systems for A planar aerostatically guided direct drive system, rotation r z are measured by high-resolution plane Regarding absolute…
A. Tag,
V. Chauhan
R. Weigel
A. Hagelauer
B. Bader
C. Huck
M. Pitschi
D. Karolewski
IEEE International Ultrasonics Symposium (IUS), 21 – 24 Oct. 2015,
DOI: http://dx.doi.org/10.1109/ULTSYM.2015.0115, ISBN: 978-1-4799-8182-3, Taipei, Taiwan
Christoph Schäffel,
Michael Katzschmann
Hans-Ulrich Mohr
Rainer Glöss
Christian Rudolf
Carolin Walenda
JSME Mechanical Engineering Journal, DOI: http://dx.doi.org/10.1299/mej.15-00111, 16.10.2015
