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Reference
  1491. NanoFab  
Close-up of the quartz glass slider with a metal lifting module, magnetic bridges and laser interferometer. IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.  
Reference
  1492. Nanofabrication and -metrology by using the nanofabrication machine (NFM-100)  
Ingo Ortlepp, Jaqueline Stauffenberg, Anja Krötschl, Denis Dontsov, Jens-Peter Zöllner, Steffen Hesse, Christoph Reuter, Steffen Strehle, Thomas Fröhlich, Ivo W. Rangelow, Eberhard Manske, 2022 Proc. SPIE 12054, Novel Patterning Technologies  
Reference
  1493. Nanometer-Positionierung mit 6D-Regelung  
Steffen Hesse, 2025 Mikroproduktion, Fachmagazin, Ausgabe 03/2025  
Reference
  1494. Nanometergenaue Hubmodule für die Präzisionsantriebstechnik  
Stephan Gorges, 2021 Konstruktion (2021) Nr. 11-12, Sonderteil Antriebstechnik  
Press release
  1495. Nanometre-precise positioning for high-tech applications  
SIOS and IMMS combine expertise from research and industry in the new MC_NPS project  
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