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Reference

1491. Multiphysics Modeling of BAW Filters

A. Tag, Vikrant Chauhan, Robert Weigel, Amelie Hagelauer, B. Bader, C. Huck, M. Pitschi, Dominik Karolewski, Taipei, Taiwan 2015 2015 IEEE International Ultrasonics Symposium (IUS)

Reference

1492. MUSIK

IMMS investigated and modelled MEMS and BAW resonater characteristics to develop basic blocks for MEMS design. Photograph: IMMS.

IMMS has investigated, modelled and validated MEMS characteristics to develop basic blocks for a universally applicable method for MEMS design.

Press release

1493. Nachruf. Wir nehmen Abschied von einem unserer Gründungsväter.

Prof. Dr.-Ing. habil. Prof. h.c. Eberhard Kallenbach (*16.08.1935 † 19.10.2016), Mitbegründer des IMMS. Foto: Reinhard Ferdinand (CC, Beschnitt: IMMS).

Prof. Dr.-Ing. habil. Prof. h.c. Eberhard Kallenbach (* 16. August 1935, † 19. Oktober 2016)

Reference

1494. Nachrüstbares Monitoring – Defekte Straßenlampen clever ausfindig machen

Sören Schneider, Marco Götze, Silvia Krug, Kathrin Veigel, 2024 in elektroniknet.de

Reference

1495. NanoFab

Close-up of the quartz glass slider with a metal lifting module, magnetic bridges and laser interferometer.

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.

Reference

1496. Nanofabrication and -metrology by using the nanofabrication machine (NFM-100)

Ingo Ortlepp, Jaqueline Stauffenberg, Anja Krötschl, Denis Dontsov, Jens-Peter Zöllner, Steffen Hesse, Christoph Reuter, Steffen Strehle, Thomas Fröhlich, Ivo W. Rangelow, Eberhard Manske, 2022 Proc. SPIE 12054, Novel Patterning Technologies

Reference

1497. Nanometer-Positionierung mit 6D-Regelung

Steffen Hesse, 2025 Mikroproduktion, Fachmagazin, Ausgabe 03/2025

Reference

1498. Nanometergenaue Hubmodule für die Präzisionsantriebstechnik

Stephan Gorges, 2021 Konstruktion (2021) Nr. 11-12, Sonderteil Antriebstechnik

Press release

1499. Nanometre-precise positioning for high-tech applications

Representatives of SIOS and IMMS, partners in the MC_NPS project, at the kick-off meeting on 5 November 2025 in Ilmenau. Photograph: Rolf Peukert, IMMS.

SIOS and IMMS combine expertise from research and industry in the new MC_NPS project

Reference

1500. Nanopositioniersysteme grosser Bewegungsbereiche