Skip to main content

Current Publication

Nanofabrication and -metrology by using the nanofabrication machine (NFM-100)

Ingo Ortlepp1. Jaqueline Stauffenberg1. Anja Krötschl1. Denis Dontsov2. Jens-Peter Zöllner1. Steffen Hesse3. Christoph Reuter1. Steffen Strehle1. Thomas Fröhlich1. Ivo W. Rangelow1. Eberhard Manske1.

In Novel Patterning Technologies 2022 (Vol. 12054, pp. 76-87). SPIE, DOI: doi.org/10.1117/12.2615118

1Technische Universität Ilmenau, Germany. 2SIOS Meßtechnik GmbH, Germany. 3IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.

Related content

Project

NanoFab

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.

Award

iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"

Alex S. Huaman

Award

Best Paper Award für den Beitrag: Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control

Alex S. Huaman

Back