The MUSIK research group has worked on the amplifying, controlling, oscillating and switching properties of MEMS (micro-electro-mechanical systems) to design MEMS in conjunction with the electronics for radio frequency circuits and systems. One aim was to achieve a universally applicable design method which will abolish the technological discrepancy between conventional MEMS design methods and computer-aided, model-based circuit design methods which are currently used for ASICs. Another aim was to create an entire system from the innovative SiCer material.

IMMS investigated and modelled the properties of MEMS to formulate the basic building blocks of a universal MEMS design methodology. Library elements were developed which formed the basis of the component and system simulations carried out in the project. FEM was used to examine the components, then they were described analytically and incorporated as a behavioural model in a start-to-finish design flow. One of the foci of the IMMS research was the basic blocks for an RF MEMS switch, an RF MEMS resonator and bulk acoustic wave (BAW) resonators for BAW filters made on the SiCer platform used in the project.

The results for individual MEMS components have been used for the entire system examination. IMMS has transferred the models for typical components, adapted them to the new SiCer bonded substrate and extended their usability to include thermal effects and certain non-linear properties.