Current Publication
Design and Modeling Approach for a Lifting and Actuating Unit for the Application in Nano-Precision Machines
Stephan Gorges1.
Steffen Hesse1.
33rd Annual Meeting of the American Society for Precision Engineering (ASPE), 2018, 4-9 November 2018, Las Vegas, Nevada, USA
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.
Related content
Project
INPOS
Novel 6DOF integrated direct drive moving large objects with small vertical dimensions through nanometre spaces
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award