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Current Publication

Design and Modeling Approach for a Lifting and Actuating Unit for the Application in Nano-Precision Machines

Stephan Gorges1. Steffen Hesse1.

33rd Annual Meeting of the American Society for Precision Engineering (ASPE), 2018, 4-9 November 2018, Las Vegas, Nevada, USA

1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.

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