IMMS - Design and Modeling Approach for a Lifting and Actuating Unit for the Application in Nano-Precision Machines

Current Publication

Design and Modeling Approach for a Lifting and Actuating Unit for the Application in Nano-Precision Machines

Stephan Gorges¹, Steffen Hesse¹

33rd Annual Meeting of the American Society for Precision Engineering (ASPE), 04 November 2018 – 09 November 2018, Las Vegas, Nevada, USA

¹IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany

Magnetic 6D-direct drives with nanometre precision Talk and poster presentation

Related content

Project

INPOS

Novel 6DOF integrated direct drive moving large objects with small vertical dimensions through nanometre spaces

Close-up of the quartz glass slider with a metal lifting module, magnetic bridges and laser interferometer.

Project

NanoFab

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.

Award

iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"

Alex S. Huaman

Award

Best Paper Award für den Beitrag: Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control

Alex S. Huaman

Research

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