1204 results
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Determination of yaw angle of mirror origin in a 6-DOF nanopositioning stage
Davi Anders Brasil1. Michael Katzschmann1. Steffen Hesse1. Ludwig Herzog1. Thomas Kissinger2. Thomas Fröhlich2.International Scientific Symposium on World Interferometry Day 2026, 20. April 2026, Ilmenau, Germany1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. 2Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Germany. -
Developing and Testing RF modules in CMOS for ISM and SRD Bands using PXI platform
B. Bieske1. K. Heinrich2.9th International Multi-Conference on Systems, Signals and Devices (SSD), 2012, Chemnitz, 20.03.2012-23.3.20121IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau. 2X-FAB Semiconductor Foundries AG, Erfurt.Talk -
Developing and Testing RF modules in CMOS for ISM and SRD Bands using PXI platform
B. Bieske1. K. Heinrich2.9th International Multi-Conference on Systems, Signals and Devices (SSD), 2012, Digital Object Identifier: 10.1109/SSD.2012.6197945, ieeexplore.ieee.org, IEEE Xplore Digital Library, E-ISBN 978-1-4673-1589-01IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau. 2X-FAB Semiconductor Foundries AG, Erfurt.Article -
Developing and Testing RF modules in CMOS for ISM Bands using PXI platform
Björn Bieske1. Klaus Heinrich2.Transactions on Systems, Signal & Devices (TSSD), Vol. 8, No. 4, pp. 1-131IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau. 2X-FAB Semiconductor Foundries AG, Erfurt.Article -
Development of a vertical wafer stage for high vakuum applications
E. Beckert1. A. Hoffmann1. E. Saffert2.Micro- and Nano-Engineering 2000, September 20001IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau. 2TU Ilmenau.Talk -
Development and validation of a simplified coil model for CFD simulation of a nano-positioning planar drive system
Ina Naujokat1. Ludwig Herzog1. Steffen Hesse1. Parastoo Salimitari1.Euspen Special Interest Conference: Precision & Performance 2025, Proceedings: www.euspen.eu/euspen-knowledge-base/proceedings-search/, November 18-20, 2025, Cranfield University, United Kingdom1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. -
Development of a bandwidth measurement for photo diodes
M. Meister1.X-FAB Workshop 'Process Development & Characterisation Workshop on Innovation', 15.-16.11.2006, Luisenthal1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.Talk -
Development of a digital SQUID magnetometer for widely varying fields in urban environment
T. Reich1.Oktober 2009, Technische Universität Ilmenau1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.Article -
Development of a vertical wafer stage for high vacuum applications
E. Beckert1.15th Annual Meeting American Society of Precision Engineers (ASPE), Scottsdale, Arizona, USA, Oktober 20001IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau.Talk -
Development of an Integrated Guiding and Actuation Element for High Dynamic Nanopositioning Systems
Stephan Gorges1. Bianca Leistritz1. Steffen Hesse1. I. Ortlepp2. G. Slotta3. Christoph Schäffel1.Ilmenau Scientific Colloquium 2017, Session 1.1 – Precision Measurement Technology, 11-15 September 2017, Ilmenau1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 2Institut für Prozessmess- und Sensortechnik, TU Ilmenau. 3AeroLas GmbH.