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Current Publication

Development of a vertical wafer stage for high vakuum applications

E. Beckert1. A. Hoffmann1. E. Saffert2.

Micro- and Nano-Engineering 2000, September 2000

1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ilmenau. 2TU Ilmenau.
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