Development and validation of a simplified coil model for CFD simulation of a nano-positioning planar drive system

Ina Naujokat¹. Ludwig Herzog¹. Steffen Hesse¹. Parastoo Salimitari¹.

Euspen Special Interest Conference: Precision & Performance 2025, November 18-20, 2025, Cranfield University, United Kingdom

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.

Magnetic 6D-direct drives with nanometre precision Smart distributed measurement and test systems Reviewed scientific article

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