For fundamental research on nanometrology and nanofabrication at Ilmenau TU, the nanofabrication machine NFM-100 was realised as a system which enables the scanning of surfaces (AFM) as well as the processing by field emission scanning probe lithography for the first time in an xy-travel range of Ø100 mm.
K. Gastinger,
M. Kujawinska
U. Zeitner
C. Gorecki
Dr. Ch. Schäffel
S. Beer
R. Moosburger
M. Pizzi
Photonics Europe 2010, 12.04-16.04.2010, Brüssel, Belgien
M. Meister,
B. Bieske
ISCE 2006 - The Tenth IEEE International Symposium on Consumer Electronics, 29.06.-01.07.2006, St. Petersburg (Russland). ISBN: 1-4244-0216-6
M. Meister,
B. Bieske
ISCE 2006 - The Tenth IEEE International Symposium on Consumer Electronics, 29.06.-01.07.2006, St. Petersburg (Russland), ISBN: 1-4244-0216-6