IMMS - Publications overview

Publications overview –VirtuSen

Hybrid Characterization and Reconstruction of Transient Thermal Fields in 6-DOF Nanopositioning Systems
Parastoo Salimitari¹. Ina Naujokat¹. Ahmed Rahat¹. Amin Suaad¹. Ludwig Herzog¹. Tino Hutschenreuther¹.
2026 PI Symposium on Mechatronics System Design, June 16-17, 2026, Karlsruhe, Germany
¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany..
Magnetic 6D-direct drives with nanometre precision Smart distributed measurement and test systems Talk and poster presentationVirtuSen
Challenges of Building AI-Based Virtual Temperature Sensors for Nanopositioning Systems (NPS)
Amin Suaad¹. Silvia Krug^{1, 2}. Tino Hutschenreuther¹.
IEEE AI4IM 2026, IEEE Symposium on Artificial Intelligence for Instrumentation and Measurement, Mai 21-23, 2026, Amalfi, Italy
¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany. ²Department of Computer and Electrical Engineering, Mid Sweden University, Holmgatan 10, 851 70 Sundsvall, Sweden.
Magnetic 6D-direct drives with nanometre precision Smart distributed measurement and test systems Reviewed scientific articleVirtuSen
Thermal Analysis of a Coil Assembly in a Nanopositioning Drive System via Reduced-Complexity CFD Modeling
Ina Naujokat¹. Ludwig Herzog¹. Steffen Hesse¹. Parastoo Salimitari¹.
Applied Sciences 2026, 16, 2748. DOI: doi.org/10.3390/app16062748
¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany.
Magnetic 6D-direct drives with nanometre precision Smart distributed measurement and test systems Reviewed scientific articleVirtuSen
Development and validation of a simplified coil model for CFD simulation of a nano-positioning planar drive system
Ina Naujokat¹. Ludwig Herzog¹. Steffen Hesse¹. Parastoo Salimitari¹.
Euspen Special Interest Conference: Precision & Performance 2025, Proceedings: www.euspen.eu/euspen-knowledge-base/proceedings-search/, November 18-20, 2025, Cranfield University, United Kingdom

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany.
Magnetic 6D-direct drives with nanometre precision Smart distributed measurement and test systems Talk and poster presentationVirtuSen
Experimental characterization of thermal disturbances in a 6DOF nanopositioning system under varying operational conditions
Parastoo Salimitari¹. Steffen Hesse¹. Michael Katzschmann¹. Ludwig Herzog¹.
Euspen Special Interest Conference: Precision & Performance 2025, Proceedings: www.euspen.eu/euspen-knowledge-base/proceedings-search/, November 18-20, 2025, Cranfield University, United Kingdom

¹IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany.
Magnetic 6D-direct drives with nanometre precision Smart distributed measurement and test systems Talk and poster presentationVirtuSen

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Hybrid Characterization and Reconstruction of Transient Thermal Fields in 6-DOF Nanopositioning Systems

Challenges of Building AI-Based Virtual Temperature Sensors for Nanopositioning Systems (NPS)

Thermal Analysis of a Coil Assembly in a Nanopositioning Drive System via Reduced-Complexity CFD Modeling

Development and validation of a simplified coil model for CFD simulation of a nano-positioning planar drive system

Experimental characterization of thermal disturbances in a 6DOF nanopositioning system under varying operational conditions