Development and validation of a simplified coil model for CFD simulation of a nano-positioning planar drive system

Ina Naujokat¹, Ludwig Herzog¹, Steffen Hesse¹, Parastoo Salimitari¹

Euspen Special Interest Conference: Precision & Performance 2025, 18 November 2025 – 20 November 2025, Cranfield University, United Kingdom, Proceedings: https://www.euspen.eu/

¹IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany

Magnetic 6D-direct drives with nanometre precision Smart distributed measurement and test systems Talk and poster presentation

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