Publikationsübersicht –VirtuSen
Development and validation of a simplified coil model for CFD simulation of a nano-positioning planar drive system
Ina Naujokat1. Ludwig Herzog1. Steffen Hesse1. Parastoo Salimitari1.Euspen Special Interest Conference: Precision & Performance 2025, November 18-20, 2025, Cranfield University, United Kingdom
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.Experimental characterization of thermal disturbances in a 6DOF nanopositioning system under varying operational conditions
Parastoo Salimitari1. Steffen Hesse1. Michael Katzschmann1. Ludwig Herzog1.Euspen Special Interest Conference: Precision & Performance 2025, November 18-20, 2025, Cranfield University, United Kingdom
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany.