Publications overview –NFM-100
Tip-based nanofabrication below 40 nm combined with a nanopositioning machine with a movement range of Ø100 mm
Jaqueline Stauffenberg1. Michael Reibe1. Anja Krötschl2. Christoph Reuter2. Ingo Ortlepp1,2. Denis Dontsov3. Steffen Hesse4. Ivo W. Rangelow1,5. Steffen Strehle2. Eberhard Manske1.Micro and Nano Engineering, Volume 19, 2023, 100201, ISSN 2590-0072, DOI: doi.org/10.1016/j.mne.2023.100201
1Institute of Process Measurement and Sensor Technology, Production and Precision Measurement Technology Group, Technische Universität Ilmenau, Gustav-Kirchhoff-Straße 1, Ilmenau 98693, Thuringia, Germany. 2Institute of Micro- and Nanotechnologies, Microsystems Technology Group, Technische Universität Ilmenau, Max-Planck-Ring 12, Ilmenau 98693, Thuringia, Germany. 3SIOS Meßtechnik GmbH, Am Vogelherd 46, Ilmenau 98693, Thuringia, Germany. 4IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany. 5nano analytik GmbH, Ehrenbergstraße 3, Ilmenau 98693, Thuringia, Germany.