Unconventional, lateral measurements with laser focus sensors for nanopositioning stages

Current Publication

Unconventional, lateral measurements with laser focus sensors for nanopositioning stages

Davi Anders Brasil¹, Michael Katzschmann¹, Steffen Hesse¹, Ludwig Herzog¹, Thomas Fröhlich², Thomas Kissinger²

euspen Special Interest Group Meeting, "Micro/Nano Manufacturing", 28 November 2023 – 29 November 2023, Ilmenau, Germany

¹IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, ²Technische Universität Ilmenau, Fakultät Maschinenbau, Institut für Prozessmess- und Sensortechnik, Ehrenbergstraße 29, 98693 Ilmenau, Germany

Magnetic 6D-direct drives with nanometre precision Talk and poster presentation

Related content

Close-up of the quartz glass slider with a metal lifting module, magnetic bridges and laser interferometer.

Project

NanoFab

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.