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Current Publication

Unconventional, lateral measurements with laser focus sensors for nanopositioning stages

Davi Anders Brasil1. Michael Katzschmann1. Steffen Hesse1. Ludwig Herzog1. T. Fröhlich2. T. Kissinger2.

euspen Special Interest Group Meeting, "Micro/Nano Manufacturing", 28. - 29. November 2023, Ilmenau, Germany

1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, Ehrenbergstraße 27, 98693 Ilmenau, Germany. 2Institute of Process Measurement and Sensor Technology, Technische Universität Ilmenau, Germany.

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Project

NanoFab

IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.

Award

Best Paper Award für den Beitrag: Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control

Alex S. Huaman

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