Current Publication
Tip- and laser-based nanofabrication up to 100 mm with sub-nanometre precision
Ingo Ortlepp1.
Michael Kühnel1. Martin Hofmann1. Laura Weidenfeller1.
Johannes Kirchner1. Shraddha Supreeti1.
Rostyslav Mastylo1. Mathias Holz1.
Thomas Michels1. Roland Füßl1.
Ivo W. Rangelow1. Thomas Fröhlich1.
Denis Dontsov2.
Christoph Schäffel3.
Eberhard Manske1.
Proc. SPIE 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, 113240A (23 March 2020), DOI: doi.org/10.1117/12.2551044
1Technische Universität Ilmenau, Germany.
2SIOS Meßtechnik GmbH, Germany.
3IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award