Current Publication
Tip- and laser-based nanofabrication up to 100 mm with sub-nanometre precision
Ingo Ortlepp1, Michael Kühnel1, Martin Hofmann2, Laura Weidenfeller1, Johannes Kirchner1, Shraddha Supreeti3, Rostyslav Mastylo1, Thomas Michels2, Thomas Fröhlich1, Denis Dontsov4, Christoph Schäffel5, Eberhard Manske1
Proc. SPIE 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, 113240A (23 March 2020), DOI: doi.org/10.1117/12.2551044
1Technische Universität Ilmenau, Fakultät Maschinenbau, Institut für Prozessmess- und Sensortechnik, Ehrenbergstraße 29, 98693 Ilmenau, Germany, 2Technische Universität Ilmenau, Institute of Micro- and Nanoelectronics, Gustav-Kirchhoff-Straße 1, 98693 Ilmenau, Germany, 3Technische Universität Ilmenau, Institute of Micro- and Nanotechnologies (IMN) MacroNano®, Micromechanical Systems Group, Gustav-Kirchhoff-Straße 7, 98693 Ilmenau, Germany, 4SIOS Meßtechnik GmbH, Am Vogelherd 46, 98693 Ilmenau, Germany, 5IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award