Current Publication
Robust Adaptive Tracking Control of a 3D Vertical Motion System for Nanometer Precision Applications
Alex S. Huaman1.
Johann Reger2.
22nd IFAC World Congress, Yokohama, Japan, July 9-14, 2023, IFAC-PapersOnLine, Volume 56, Issue 2, 2023, Pages 5332-5339, ISSN 2405-8963, DOI: doi.org/10.1016/j.ifacol.2023.10.177.
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.
2Control Engineering Group, Technische Universität Ilmenau, 98693 Ilmenau, P.O. Box 10-05-65, D-98684, Ilmenau, Germany.
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
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