Current Publication
Robust Adaptive Tracking Control of a 3D Vertical Motion System for Nanometer Precision Applications
Alex S. Huaman1, Johann Reger2
in IFAC-PapersOnLine, vol. 56, 2, pp. 5332-5339, 2023, DOI: doi.org/10.1016/j.ifacol.2023.10.177
1IMMS Institut für Mikroelekronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH), Ehrenbergstraße 27, 98693 Ilmenau, Germany, 2Technische Universität Ilmenau, Department of Computer Science and Automation, Control Engineering Group, 98684 Ilmenau, P.O. Box 10 05 65, Germany
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award