Current Publication
Picometer-Scale Positioning of a Linear Drive System via Feedforward-Feedback Control
Alex S. Huaman1.
Michael Katzschmann1.
Steffen Hesse1.
Christoph Schäffel1.
Christoph Weise2.
Denis Dontsov3.
Eberhard Manske2.
Johann Reger2.
2021 IEEE International Conference on Mechatronics (ICM2021), DOI: doi.org/10.1109/ICM46511.2021.9385699, 7 - 9 March 2021, Kashiwa, Japan
1IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH, 98693 Ilmenau, Germany.
2Technische Universität Ilmenau, Germany.
3SIOS Meßtechnik GmbH, Germany.
Related content
Project
NanoFab
IMMS has been working on solutions for a highly dynamic drive system for multi-axis manufacturing and processing of objects with nanometre precision in the Research Training Group 2182 ”NanoFab“.
Award
iENA silver medal for "Observer of atoms - Method for sub-nm precise control of coupled over-actuated positioning systems"
Alex S. Huaman
Award